1/5/2011	12:10:37 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/5/2011	12:10:37 AM	Recipe started at 12:10 AM
1/5/2011	12:10:38 AM	Helium valve closed
1/5/2011	12:10:38 AM	H2 valve closed
1/5/2011	12:10:38 AM	BCl3 valve closed
1/5/2011	12:10:38 AM	PH3 valve closed
1/5/2011	12:10:38 AM	SiCl4 pre valve closed
1/5/2011	12:10:38 AM	SiCl4 post valve closed
1/5/2011	12:10:38 AM	Main Vac valve closed
1/5/2011	12:10:38 AM	Bubbler valve closed
1/5/2011	12:10:38 AM	Bypass valve opened
1/5/2011	12:10:38 AM	Helium MFC set to  0.000000
1/5/2011	12:10:38 AM	H2 MFC set to  0.000000
1/5/2011	12:10:38 AM	BCl3 MFC set to  0.000000
1/5/2011	12:10:38 AM	PHl3 MFC set to  0.000000
1/5/2011	12:10:38 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:10:38 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:10:38 AM	Tube furnace set to 0
1/5/2011	12:11:39 AM	Helium valve closed
1/5/2011	12:11:39 AM	H2 valve closed
1/5/2011	12:11:39 AM	BCl3 valve closed
1/5/2011	12:11:39 AM	PH3 valve closed
1/5/2011	12:11:39 AM	SiCl4 pre valve closed
1/5/2011	12:11:39 AM	SiCl4 post valve closed
1/5/2011	12:11:39 AM	Bubbler valve closed
1/5/2011	12:11:39 AM	Main Vac valve opened
1/5/2011	12:11:39 AM	Bypass valve opened
1/5/2011	12:11:39 AM	Helium MFC set to  0.000000
1/5/2011	12:11:39 AM	H2 MFC set to  0.000000
1/5/2011	12:11:39 AM	BCl3 MFC set to  0.000000
1/5/2011	12:11:39 AM	PHl3 MFC set to  0.000000
1/5/2011	12:11:39 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:11:39 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:11:39 AM	Tube furnace set to 0
1/5/2011	12:11:39 AM	Run finished at 12:11 AM
1/5/2011	12:11:39 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/5/2011	12:12:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/5/2011	12:12:38 AM	Recipe started at 12:12 AM
1/5/2011	12:12:38 AM	Helium valve closed
1/5/2011	12:12:38 AM	H2 valve closed
1/5/2011	12:12:38 AM	BCl3 valve closed
1/5/2011	12:12:38 AM	PH3 valve closed
1/5/2011	12:12:38 AM	SiCl4 pre valve closed
1/5/2011	12:12:38 AM	SiCl4 post valve closed
1/5/2011	12:12:38 AM	Main Vac valve closed
1/5/2011	12:12:38 AM	Bubbler valve closed
1/5/2011	12:12:38 AM	Bypass valve opened
1/5/2011	12:12:38 AM	Helium MFC set to  0.000000
1/5/2011	12:12:38 AM	H2 MFC set to  0.000000
1/5/2011	12:12:38 AM	BCl3 MFC set to  0.000000
1/5/2011	12:12:38 AM	PHl3 MFC set to  0.000000
1/5/2011	12:12:38 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:12:38 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:12:38 AM	Tube furnace set to 0
1/5/2011	12:12:38 AM	Helium valve closed
1/5/2011	12:12:38 AM	H2 valve closed
1/5/2011	12:12:38 AM	BCl3 valve closed
1/5/2011	12:12:38 AM	PH3 valve closed
1/5/2011	12:12:38 AM	SiCl4 pre valve closed
1/5/2011	12:12:38 AM	SiCl4 post valve closed
1/5/2011	12:12:38 AM	Bubbler valve closed
1/5/2011	12:12:38 AM	Main Vac valve opened
1/5/2011	12:12:38 AM	Bypass valve opened
1/5/2011	12:12:38 AM	Helium MFC set to  0.000000
1/5/2011	12:12:38 AM	H2 MFC set to  0.000000
1/5/2011	12:12:38 AM	BCl3 MFC set to  0.000000
1/5/2011	12:12:38 AM	PHl3 MFC set to  0.000000
1/5/2011	12:12:38 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:12:38 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:12:38 AM	Tube furnace set to 0
1/5/2011	12:13:38 AM	H2 valve closed
1/5/2011	12:13:38 AM	BCl3 valve closed
1/5/2011	12:13:38 AM	PH3 valve closed
1/5/2011	12:13:38 AM	SiCl4 pre valve closed
1/5/2011	12:13:38 AM	SiCl4 post valve closed
1/5/2011	12:13:38 AM	Bubbler valve closed
1/5/2011	12:13:38 AM	Helium valve opened
1/5/2011	12:13:38 AM	Main Vac valve opened
1/5/2011	12:13:38 AM	Bypass valve opened
1/5/2011	12:13:38 AM	Helium MFC set to  100.000000
1/5/2011	12:13:38 AM	H2 MFC set to  0.000000
1/5/2011	12:13:38 AM	BCl3 MFC set to  0.000000
1/5/2011	12:13:38 AM	PHl3 MFC set to  0.000000
1/5/2011	12:13:38 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:13:38 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:13:39 AM	Tube furnace set to 0
1/5/2011	12:14:39 AM	Helium valve closed
1/5/2011	12:14:39 AM	H2 valve closed
1/5/2011	12:14:39 AM	BCl3 valve closed
1/5/2011	12:14:39 AM	PH3 valve closed
1/5/2011	12:14:39 AM	SiCl4 pre valve closed
1/5/2011	12:14:39 AM	SiCl4 post valve closed
1/5/2011	12:14:39 AM	Bubbler valve closed
1/5/2011	12:14:39 AM	Main Vac valve opened
1/5/2011	12:14:39 AM	Bypass valve opened
1/5/2011	12:14:39 AM	Helium MFC set to  0.000000
1/5/2011	12:14:39 AM	H2 MFC set to  0.000000
1/5/2011	12:14:39 AM	BCl3 MFC set to  0.000000
1/5/2011	12:14:39 AM	PHl3 MFC set to  0.000000
1/5/2011	12:14:39 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:14:39 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:14:39 AM	Tube furnace set to 0
1/5/2011	12:15:39 AM	H2 valve closed
1/5/2011	12:15:39 AM	BCl3 valve closed
1/5/2011	12:15:39 AM	PH3 valve closed
1/5/2011	12:15:39 AM	SiCl4 pre valve closed
1/5/2011	12:15:39 AM	SiCl4 post valve closed
1/5/2011	12:15:39 AM	Bubbler valve closed
1/5/2011	12:15:39 AM	Helium valve opened
1/5/2011	12:15:39 AM	Main Vac valve opened
1/5/2011	12:15:39 AM	Bypass valve opened
1/5/2011	12:15:39 AM	Helium MFC set to  100.000000
1/5/2011	12:15:39 AM	H2 MFC set to  0.000000
1/5/2011	12:15:39 AM	BCl3 MFC set to  0.000000
1/5/2011	12:15:39 AM	PHl3 MFC set to  0.000000
1/5/2011	12:15:39 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:15:39 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:15:39 AM	Tube furnace set to 0
1/5/2011	12:16:39 AM	Helium valve closed
1/5/2011	12:16:39 AM	H2 valve closed
1/5/2011	12:16:39 AM	BCl3 valve closed
1/5/2011	12:16:39 AM	PH3 valve closed
1/5/2011	12:16:39 AM	SiCl4 pre valve closed
1/5/2011	12:16:39 AM	SiCl4 post valve closed
1/5/2011	12:16:39 AM	Bubbler valve closed
1/5/2011	12:16:39 AM	Main Vac valve opened
1/5/2011	12:16:39 AM	Bypass valve opened
1/5/2011	12:16:39 AM	Helium MFC set to  0.000000
1/5/2011	12:16:39 AM	H2 MFC set to  0.000000
1/5/2011	12:16:39 AM	BCl3 MFC set to  0.000000
1/5/2011	12:16:39 AM	PHl3 MFC set to  0.000000
1/5/2011	12:16:39 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:16:39 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:16:39 AM	Tube furnace set to 0
1/5/2011	12:17:39 AM	H2 valve closed
1/5/2011	12:17:39 AM	BCl3 valve closed
1/5/2011	12:17:39 AM	PH3 valve closed
1/5/2011	12:17:39 AM	SiCl4 pre valve closed
1/5/2011	12:17:39 AM	SiCl4 post valve closed
1/5/2011	12:17:39 AM	Bubbler valve closed
1/5/2011	12:17:39 AM	Helium valve opened
1/5/2011	12:17:39 AM	Main Vac valve opened
1/5/2011	12:17:39 AM	Bypass valve opened
1/5/2011	12:17:39 AM	Helium MFC set to  100.000000
1/5/2011	12:17:39 AM	H2 MFC set to  0.000000
1/5/2011	12:17:39 AM	BCl3 MFC set to  0.000000
1/5/2011	12:17:39 AM	PHl3 MFC set to  0.000000
1/5/2011	12:17:39 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:17:39 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:17:39 AM	Tube furnace set to 0
1/5/2011	12:18:39 AM	Helium valve closed
1/5/2011	12:18:39 AM	H2 valve closed
1/5/2011	12:18:39 AM	BCl3 valve closed
1/5/2011	12:18:39 AM	PH3 valve closed
1/5/2011	12:18:39 AM	SiCl4 pre valve closed
1/5/2011	12:18:39 AM	SiCl4 post valve closed
1/5/2011	12:18:39 AM	Bubbler valve closed
1/5/2011	12:18:39 AM	Main Vac valve opened
1/5/2011	12:18:39 AM	Bypass valve opened
1/5/2011	12:18:39 AM	Helium MFC set to  0.000000
1/5/2011	12:18:39 AM	H2 MFC set to  0.000000
1/5/2011	12:18:39 AM	BCl3 MFC set to  0.000000
1/5/2011	12:18:39 AM	PHl3 MFC set to  0.000000
1/5/2011	12:18:39 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:18:39 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:18:40 AM	Tube furnace set to 0
1/5/2011	12:19:40 AM	H2 valve closed
1/5/2011	12:19:40 AM	BCl3 valve closed
1/5/2011	12:19:40 AM	PH3 valve closed
1/5/2011	12:19:40 AM	SiCl4 pre valve closed
1/5/2011	12:19:40 AM	SiCl4 post valve closed
1/5/2011	12:19:40 AM	Bubbler valve closed
1/5/2011	12:19:40 AM	Helium valve opened
1/5/2011	12:19:40 AM	Main Vac valve opened
1/5/2011	12:19:40 AM	Bypass valve opened
1/5/2011	12:19:40 AM	Helium MFC set to  100.000000
1/5/2011	12:19:40 AM	H2 MFC set to  0.000000
1/5/2011	12:19:40 AM	BCl3 MFC set to  0.000000
1/5/2011	12:19:40 AM	PHl3 MFC set to  0.000000
1/5/2011	12:19:40 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:19:40 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:19:40 AM	Tube furnace set to 0
1/5/2011	12:20:40 AM	Helium valve closed
1/5/2011	12:20:40 AM	H2 valve closed
1/5/2011	12:20:40 AM	BCl3 valve closed
1/5/2011	12:20:40 AM	PH3 valve closed
1/5/2011	12:20:40 AM	SiCl4 pre valve closed
1/5/2011	12:20:40 AM	SiCl4 post valve closed
1/5/2011	12:20:40 AM	Bubbler valve closed
1/5/2011	12:20:40 AM	Main Vac valve opened
1/5/2011	12:20:40 AM	Bypass valve opened
1/5/2011	12:20:40 AM	Helium MFC set to  0.000000
1/5/2011	12:20:40 AM	H2 MFC set to  0.000000
1/5/2011	12:20:40 AM	BCl3 MFC set to  0.000000
1/5/2011	12:20:40 AM	PHl3 MFC set to  0.000000
1/5/2011	12:20:40 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:20:40 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:20:40 AM	Tube furnace set to 0
1/5/2011	12:21:40 AM	H2 valve closed
1/5/2011	12:21:40 AM	BCl3 valve closed
1/5/2011	12:21:40 AM	PH3 valve closed
1/5/2011	12:21:40 AM	SiCl4 pre valve closed
1/5/2011	12:21:40 AM	SiCl4 post valve closed
1/5/2011	12:21:40 AM	Bubbler valve closed
1/5/2011	12:21:40 AM	Helium valve opened
1/5/2011	12:21:40 AM	Main Vac valve opened
1/5/2011	12:21:40 AM	Bypass valve opened
1/5/2011	12:21:40 AM	Helium MFC set to  100.000000
1/5/2011	12:21:40 AM	H2 MFC set to  0.000000
1/5/2011	12:21:40 AM	BCl3 MFC set to  0.000000
1/5/2011	12:21:40 AM	PHl3 MFC set to  0.000000
1/5/2011	12:21:40 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:21:40 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:21:40 AM	Tube furnace set to 0
1/5/2011	12:22:40 AM	Helium valve closed
1/5/2011	12:22:40 AM	H2 valve closed
1/5/2011	12:22:40 AM	BCl3 valve closed
1/5/2011	12:22:40 AM	PH3 valve closed
1/5/2011	12:22:40 AM	SiCl4 pre valve closed
1/5/2011	12:22:40 AM	SiCl4 post valve closed
1/5/2011	12:22:40 AM	Bubbler valve closed
1/5/2011	12:22:40 AM	Main Vac valve opened
1/5/2011	12:22:40 AM	Bypass valve opened
1/5/2011	12:22:40 AM	Helium MFC set to  0.000000
1/5/2011	12:22:40 AM	H2 MFC set to  0.000000
1/5/2011	12:22:40 AM	BCl3 MFC set to  0.000000
1/5/2011	12:22:40 AM	PHl3 MFC set to  0.000000
1/5/2011	12:22:40 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:22:40 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:22:40 AM	Tube furnace set to 0
1/5/2011	12:23:40 AM	H2 valve closed
1/5/2011	12:23:40 AM	BCl3 valve closed
1/5/2011	12:23:40 AM	PH3 valve closed
1/5/2011	12:23:40 AM	SiCl4 pre valve closed
1/5/2011	12:23:40 AM	SiCl4 post valve closed
1/5/2011	12:23:40 AM	Bubbler valve closed
1/5/2011	12:23:40 AM	Helium valve opened
1/5/2011	12:23:40 AM	Main Vac valve opened
1/5/2011	12:23:40 AM	Bypass valve opened
1/5/2011	12:23:40 AM	Helium MFC set to  100.000000
1/5/2011	12:23:40 AM	H2 MFC set to  0.000000
1/5/2011	12:23:40 AM	BCl3 MFC set to  0.000000
1/5/2011	12:23:40 AM	PHl3 MFC set to  0.000000
1/5/2011	12:23:40 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:23:40 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:23:41 AM	Tube furnace set to 0
1/5/2011	12:24:41 AM	Helium valve closed
1/5/2011	12:24:41 AM	H2 valve closed
1/5/2011	12:24:41 AM	BCl3 valve closed
1/5/2011	12:24:41 AM	PH3 valve closed
1/5/2011	12:24:41 AM	SiCl4 pre valve closed
1/5/2011	12:24:41 AM	SiCl4 post valve closed
1/5/2011	12:24:41 AM	Bubbler valve closed
1/5/2011	12:24:41 AM	Main Vac valve opened
1/5/2011	12:24:41 AM	Bypass valve opened
1/5/2011	12:24:41 AM	Helium MFC set to  0.000000
1/5/2011	12:24:41 AM	H2 MFC set to  0.000000
1/5/2011	12:24:41 AM	BCl3 MFC set to  0.000000
1/5/2011	12:24:41 AM	PHl3 MFC set to  0.000000
1/5/2011	12:24:41 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:24:41 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:24:41 AM	Tube furnace set to 0
1/5/2011	12:25:41 AM	H2 valve closed
1/5/2011	12:25:41 AM	BCl3 valve closed
1/5/2011	12:25:41 AM	PH3 valve closed
1/5/2011	12:25:41 AM	SiCl4 pre valve closed
1/5/2011	12:25:41 AM	SiCl4 post valve closed
1/5/2011	12:25:41 AM	Bubbler valve closed
1/5/2011	12:25:41 AM	Helium valve opened
1/5/2011	12:25:41 AM	Main Vac valve opened
1/5/2011	12:25:41 AM	Bypass valve opened
1/5/2011	12:25:41 AM	Helium MFC set to  100.000000
1/5/2011	12:25:41 AM	H2 MFC set to  0.000000
1/5/2011	12:25:41 AM	BCl3 MFC set to  0.000000
1/5/2011	12:25:41 AM	PHl3 MFC set to  0.000000
1/5/2011	12:25:41 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:25:41 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:25:41 AM	Tube furnace set to 0
1/5/2011	12:26:41 AM	Helium valve closed
1/5/2011	12:26:41 AM	H2 valve closed
1/5/2011	12:26:41 AM	BCl3 valve closed
1/5/2011	12:26:41 AM	PH3 valve closed
1/5/2011	12:26:41 AM	SiCl4 pre valve closed
1/5/2011	12:26:41 AM	SiCl4 post valve closed
1/5/2011	12:26:41 AM	Bubbler valve closed
1/5/2011	12:26:41 AM	Main Vac valve opened
1/5/2011	12:26:41 AM	Bypass valve opened
1/5/2011	12:26:41 AM	Helium MFC set to  0.000000
1/5/2011	12:26:41 AM	H2 MFC set to  0.000000
1/5/2011	12:26:41 AM	BCl3 MFC set to  0.000000
1/5/2011	12:26:41 AM	PHl3 MFC set to  0.000000
1/5/2011	12:26:41 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:26:41 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:26:41 AM	Tube furnace set to 0
1/5/2011	12:27:41 AM	H2 valve closed
1/5/2011	12:27:41 AM	BCl3 valve closed
1/5/2011	12:27:41 AM	PH3 valve closed
1/5/2011	12:27:41 AM	SiCl4 pre valve closed
1/5/2011	12:27:41 AM	SiCl4 post valve closed
1/5/2011	12:27:41 AM	Bubbler valve closed
1/5/2011	12:27:41 AM	Helium valve opened
1/5/2011	12:27:41 AM	Main Vac valve opened
1/5/2011	12:27:41 AM	Bypass valve opened
1/5/2011	12:27:41 AM	Helium MFC set to  100.000000
1/5/2011	12:27:41 AM	H2 MFC set to  0.000000
1/5/2011	12:27:41 AM	BCl3 MFC set to  0.000000
1/5/2011	12:27:41 AM	PHl3 MFC set to  0.000000
1/5/2011	12:27:41 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:27:41 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:27:41 AM	Tube furnace set to 0
1/5/2011	12:28:41 AM	Helium valve closed
1/5/2011	12:28:41 AM	H2 valve closed
1/5/2011	12:28:41 AM	BCl3 valve closed
1/5/2011	12:28:41 AM	PH3 valve closed
1/5/2011	12:28:41 AM	SiCl4 pre valve closed
1/5/2011	12:28:41 AM	SiCl4 post valve closed
1/5/2011	12:28:41 AM	Bubbler valve closed
1/5/2011	12:28:41 AM	Main Vac valve opened
1/5/2011	12:28:41 AM	Bypass valve opened
1/5/2011	12:28:42 AM	Helium MFC set to  0.000000
1/5/2011	12:28:42 AM	H2 MFC set to  0.000000
1/5/2011	12:28:42 AM	BCl3 MFC set to  0.000000
1/5/2011	12:28:42 AM	PHl3 MFC set to  0.000000
1/5/2011	12:28:42 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:28:42 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:28:42 AM	Tube furnace set to 0
1/5/2011	12:29:42 AM	H2 valve closed
1/5/2011	12:29:42 AM	BCl3 valve closed
1/5/2011	12:29:42 AM	PH3 valve closed
1/5/2011	12:29:42 AM	SiCl4 pre valve closed
1/5/2011	12:29:42 AM	SiCl4 post valve closed
1/5/2011	12:29:42 AM	Bubbler valve closed
1/5/2011	12:29:42 AM	Helium valve opened
1/5/2011	12:29:42 AM	Main Vac valve opened
1/5/2011	12:29:42 AM	Bypass valve opened
1/5/2011	12:29:42 AM	Helium MFC set to  100.000000
1/5/2011	12:29:42 AM	H2 MFC set to  0.000000
1/5/2011	12:29:42 AM	BCl3 MFC set to  0.000000
1/5/2011	12:29:42 AM	PHl3 MFC set to  0.000000
1/5/2011	12:29:42 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:29:42 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:29:42 AM	Tube furnace set to 0
1/5/2011	12:30:42 AM	Helium valve closed
1/5/2011	12:30:42 AM	H2 valve closed
1/5/2011	12:30:42 AM	BCl3 valve closed
1/5/2011	12:30:42 AM	PH3 valve closed
1/5/2011	12:30:42 AM	SiCl4 pre valve closed
1/5/2011	12:30:42 AM	SiCl4 post valve closed
1/5/2011	12:30:42 AM	Bubbler valve closed
1/5/2011	12:30:42 AM	Main Vac valve opened
1/5/2011	12:30:42 AM	Bypass valve opened
1/5/2011	12:30:42 AM	Helium MFC set to  0.000000
1/5/2011	12:30:42 AM	H2 MFC set to  0.000000
1/5/2011	12:30:42 AM	BCl3 MFC set to  0.000000
1/5/2011	12:30:42 AM	PHl3 MFC set to  0.000000
1/5/2011	12:30:42 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:30:42 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:30:42 AM	Tube furnace set to 0
1/5/2011	12:31:42 AM	H2 valve closed
1/5/2011	12:31:42 AM	BCl3 valve closed
1/5/2011	12:31:42 AM	PH3 valve closed
1/5/2011	12:31:42 AM	SiCl4 pre valve closed
1/5/2011	12:31:42 AM	SiCl4 post valve closed
1/5/2011	12:31:42 AM	Bubbler valve closed
1/5/2011	12:31:42 AM	Helium valve opened
1/5/2011	12:31:42 AM	Main Vac valve opened
1/5/2011	12:31:42 AM	Bypass valve opened
1/5/2011	12:31:42 AM	Helium MFC set to  100.000000
1/5/2011	12:31:42 AM	H2 MFC set to  0.000000
1/5/2011	12:31:42 AM	BCl3 MFC set to  0.000000
1/5/2011	12:31:42 AM	PHl3 MFC set to  0.000000
1/5/2011	12:31:42 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:31:42 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:31:42 AM	Tube furnace set to 0
1/5/2011	12:32:42 AM	Helium valve closed
1/5/2011	12:32:42 AM	H2 valve closed
1/5/2011	12:32:42 AM	BCl3 valve closed
1/5/2011	12:32:42 AM	PH3 valve closed
1/5/2011	12:32:42 AM	SiCl4 pre valve closed
1/5/2011	12:32:42 AM	SiCl4 post valve closed
1/5/2011	12:32:42 AM	Bubbler valve closed
1/5/2011	12:32:42 AM	Main Vac valve opened
1/5/2011	12:32:42 AM	Bypass valve opened
1/5/2011	12:32:42 AM	Helium MFC set to  0.000000
1/5/2011	12:32:42 AM	H2 MFC set to  0.000000
1/5/2011	12:32:42 AM	BCl3 MFC set to  0.000000
1/5/2011	12:32:42 AM	PHl3 MFC set to  0.000000
1/5/2011	12:32:42 AM	SiCl4 MFC set to  0.000000
1/5/2011	12:32:42 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:32:42 AM	Tube furnace set to 0
1/5/2011	12:32:43 AM	Run finished at 12:32 AM
1/5/2011	12:32:43 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/5/2011	9:03:01 AM	Recipe started at 9:03 AM
1/5/2011	9:03:01 AM	Helium valve closed
1/5/2011	9:03:01 AM	BCl3 valve closed
1/5/2011	9:03:01 AM	PH3 valve closed
1/5/2011	9:03:01 AM	SiCl4 pre valve closed
1/5/2011	9:03:01 AM	SiCl4 post valve closed
1/5/2011	9:03:01 AM	Main Vac valve closed
1/5/2011	9:03:01 AM	Bypass valve closed
1/5/2011	9:03:01 AM	Bubbler valve closed
1/5/2011	9:03:01 AM	H2 valve opened
1/5/2011	9:03:01 AM	Helium MFC set to  0.000000
1/5/2011	9:03:01 AM	H2 MFC set to  500.000000
1/5/2011	9:03:01 AM	BCl3 MFC set to  0.000000
1/5/2011	9:03:01 AM	PHl3 MFC set to  0.000000
1/5/2011	9:03:01 AM	SiCl4 MFC set to  0.000000
1/5/2011	9:03:01 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	9:03:01 AM	Tube furnace set to 0
1/5/2011	9:04:25 AM	Helium valve closed
1/5/2011	9:04:25 AM	BCl3 valve closed
1/5/2011	9:04:25 AM	PH3 valve closed
1/5/2011	9:04:25 AM	SiCl4 pre valve closed
1/5/2011	9:04:25 AM	SiCl4 post valve closed
1/5/2011	9:04:25 AM	Main Vac valve closed
1/5/2011	9:04:25 AM	Bypass valve closed
1/5/2011	9:04:25 AM	H2 valve opened
1/5/2011	9:04:25 AM	Bubbler valve opened
1/5/2011	9:04:25 AM	Helium MFC set to  0.000000
1/5/2011	9:04:25 AM	H2 MFC set to  500.000000
1/5/2011	9:04:25 AM	BCl3 MFC set to  0.000000
1/5/2011	9:04:25 AM	PHl3 MFC set to  0.000000
1/5/2011	9:04:25 AM	SiCl4 MFC set to  0.000000
1/5/2011	9:04:25 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	9:04:25 AM	Tube furnace set to 1000
1/5/2011	9:24:25 AM	Helium valve closed
1/5/2011	9:24:25 AM	PH3 valve closed
1/5/2011	9:24:25 AM	Main Vac valve closed
1/5/2011	9:24:25 AM	Bypass valve closed
1/5/2011	9:24:25 AM	H2 valve opened
1/5/2011	9:24:25 AM	BCl3 valve opened
1/5/2011	9:24:25 AM	SiCl4 pre valve opened
1/5/2011	9:24:25 AM	SiCl4 post valve opened
1/5/2011	9:24:25 AM	Bubbler valve opened
1/5/2011	9:24:25 AM	Helium MFC set to  0.000000
1/5/2011	9:24:25 AM	H2 MFC set to  500.000000
1/5/2011	9:24:25 AM	BCl3 MFC set to  2.000000
1/5/2011	9:24:25 AM	PHl3 MFC set to  0.000000
1/5/2011	9:24:25 AM	SiCl4 MFC set to  50.000000
1/5/2011	9:24:25 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	9:24:25 AM	Tube furnace set to 1000
1/5/2011	9:39:25 AM	H2 valve closed
1/5/2011	9:39:25 AM	BCl3 valve closed
1/5/2011	9:39:25 AM	PH3 valve closed
1/5/2011	9:39:25 AM	SiCl4 pre valve closed
1/5/2011	9:39:25 AM	SiCl4 post valve closed
1/5/2011	9:39:25 AM	Main Vac valve closed
1/5/2011	9:39:25 AM	Bypass valve closed
1/5/2011	9:39:25 AM	Helium valve opened
1/5/2011	9:39:25 AM	Bubbler valve opened
1/5/2011	9:39:25 AM	Helium MFC set to  500.000000
1/5/2011	9:39:25 AM	H2 MFC set to  0.000000
1/5/2011	9:39:25 AM	BCl3 MFC set to  0.000000
1/5/2011	9:39:25 AM	PHl3 MFC set to  0.000000
1/5/2011	9:39:25 AM	SiCl4 MFC set to  0.000000
1/5/2011	9:39:25 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	9:39:26 AM	Tube furnace set to 0
1/5/2011	9:59:26 AM	Helium valve closed
1/5/2011	9:59:26 AM	H2 valve closed
1/5/2011	9:59:26 AM	BCl3 valve closed
1/5/2011	9:59:26 AM	PH3 valve closed
1/5/2011	9:59:26 AM	SiCl4 pre valve closed
1/5/2011	9:59:26 AM	SiCl4 post valve closed
1/5/2011	9:59:26 AM	Main Vac valve closed
1/5/2011	9:59:26 AM	Bypass valve closed
1/5/2011	9:59:26 AM	Bubbler valve closed
1/5/2011	9:59:26 AM	Helium MFC set to  0.000000
1/5/2011	9:59:26 AM	H2 MFC set to  0.000000
1/5/2011	9:59:26 AM	BCl3 MFC set to  0.000000
1/5/2011	9:59:26 AM	PHl3 MFC set to  0.000000
1/5/2011	9:59:26 AM	SiCl4 MFC set to  0.000000
1/5/2011	9:59:26 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	9:59:26 AM	Tube furnace set to 0
1/5/2011	9:59:26 AM	Run finished at 9:59 AM
1/5/2011	10:51:53 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/5/2011	10:52:05 AM	Recipe started at 10:51 AM
1/5/2011	10:52:05 AM	Helium valve closed
1/5/2011	10:52:05 AM	H2 valve closed
1/5/2011	10:52:05 AM	BCl3 valve closed
1/5/2011	10:52:05 AM	PH3 valve closed
1/5/2011	10:52:05 AM	SiCl4 pre valve closed
1/5/2011	10:52:05 AM	SiCl4 post valve closed
1/5/2011	10:52:05 AM	Main Vac valve closed
1/5/2011	10:52:05 AM	Bubbler valve closed
1/5/2011	10:52:05 AM	Bypass valve opened
1/5/2011	10:52:05 AM	Helium MFC set to  0.000000
1/5/2011	10:52:05 AM	H2 MFC set to  0.000000
1/5/2011	10:52:05 AM	BCl3 MFC set to  0.000000
1/5/2011	10:52:05 AM	PHl3 MFC set to  0.000000
1/5/2011	10:52:05 AM	SiCl4 MFC set to  0.000000
1/5/2011	10:52:05 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	10:52:06 AM	Tube furnace set to 0
1/5/2011	10:53:10 AM	Helium valve closed
1/5/2011	10:53:10 AM	H2 valve closed
1/5/2011	10:53:10 AM	BCl3 valve closed
1/5/2011	10:53:10 AM	PH3 valve closed
1/5/2011	10:53:10 AM	SiCl4 pre valve closed
1/5/2011	10:53:10 AM	SiCl4 post valve closed
1/5/2011	10:53:10 AM	Bubbler valve closed
1/5/2011	10:53:10 AM	Main Vac valve opened
1/5/2011	10:53:10 AM	Bypass valve opened
1/5/2011	10:53:10 AM	Helium MFC set to  0.000000
1/5/2011	10:53:10 AM	H2 MFC set to  0.000000
1/5/2011	10:53:10 AM	BCl3 MFC set to  0.000000
1/5/2011	10:53:10 AM	PHl3 MFC set to  0.000000
1/5/2011	10:53:10 AM	SiCl4 MFC set to  0.000000
1/5/2011	10:53:10 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	10:53:11 AM	Tube furnace set to 0
1/5/2011	10:54:11 AM	H2 valve closed
1/5/2011	10:54:11 AM	BCl3 valve closed
1/5/2011	10:54:11 AM	PH3 valve closed
1/5/2011	10:54:11 AM	SiCl4 pre valve closed
1/5/2011	10:54:11 AM	SiCl4 post valve closed
1/5/2011	10:54:11 AM	Bubbler valve closed
1/5/2011	10:54:11 AM	Helium valve opened
1/5/2011	10:54:11 AM	Main Vac valve opened
1/5/2011	10:54:11 AM	Bypass valve opened
1/5/2011	10:54:11 AM	Helium MFC set to  100.000000
1/5/2011	10:54:11 AM	H2 MFC set to  0.000000
1/5/2011	10:54:11 AM	BCl3 MFC set to  0.000000
1/5/2011	10:54:11 AM	PHl3 MFC set to  0.000000
1/5/2011	10:54:11 AM	SiCl4 MFC set to  0.000000
1/5/2011	10:54:11 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	10:54:11 AM	Tube furnace set to 0
1/5/2011	10:55:11 AM	Helium valve closed
1/5/2011	10:55:11 AM	H2 valve closed
1/5/2011	10:55:11 AM	BCl3 valve closed
1/5/2011	10:55:11 AM	PH3 valve closed
1/5/2011	10:55:11 AM	SiCl4 pre valve closed
1/5/2011	10:55:11 AM	SiCl4 post valve closed
1/5/2011	10:55:11 AM	Bubbler valve closed
1/5/2011	10:55:11 AM	Main Vac valve opened
1/5/2011	10:55:11 AM	Bypass valve opened
1/5/2011	10:55:11 AM	Helium MFC set to  0.000000
1/5/2011	10:55:11 AM	H2 MFC set to  0.000000
1/5/2011	10:55:11 AM	BCl3 MFC set to  0.000000
1/5/2011	10:55:11 AM	PHl3 MFC set to  0.000000
1/5/2011	10:55:11 AM	SiCl4 MFC set to  0.000000
1/5/2011	10:55:11 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	10:55:11 AM	Tube furnace set to 0
1/5/2011	10:56:11 AM	H2 valve closed
1/5/2011	10:56:11 AM	BCl3 valve closed
1/5/2011	10:56:11 AM	PH3 valve closed
1/5/2011	10:56:11 AM	SiCl4 pre valve closed
1/5/2011	10:56:11 AM	SiCl4 post valve closed
1/5/2011	10:56:11 AM	Bubbler valve closed
1/5/2011	10:56:11 AM	Helium valve opened
1/5/2011	10:56:11 AM	Main Vac valve opened
1/5/2011	10:56:11 AM	Bypass valve opened
1/5/2011	10:56:11 AM	Helium MFC set to  100.000000
1/5/2011	10:56:11 AM	H2 MFC set to  0.000000
1/5/2011	10:56:11 AM	BCl3 MFC set to  0.000000
1/5/2011	10:56:11 AM	PHl3 MFC set to  0.000000
1/5/2011	10:56:11 AM	SiCl4 MFC set to  0.000000
1/5/2011	10:56:11 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	10:56:11 AM	Tube furnace set to 0
1/5/2011	10:57:11 AM	Helium valve closed
1/5/2011	10:57:11 AM	H2 valve closed
1/5/2011	10:57:11 AM	BCl3 valve closed
1/5/2011	10:57:11 AM	PH3 valve closed
1/5/2011	10:57:11 AM	SiCl4 pre valve closed
1/5/2011	10:57:11 AM	SiCl4 post valve closed
1/5/2011	10:57:11 AM	Bubbler valve closed
1/5/2011	10:57:11 AM	Main Vac valve opened
1/5/2011	10:57:11 AM	Bypass valve opened
1/5/2011	10:57:11 AM	Helium MFC set to  0.000000
1/5/2011	10:57:11 AM	H2 MFC set to  0.000000
1/5/2011	10:57:11 AM	BCl3 MFC set to  0.000000
1/5/2011	10:57:11 AM	PHl3 MFC set to  0.000000
1/5/2011	10:57:11 AM	SiCl4 MFC set to  0.000000
1/5/2011	10:57:11 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	10:57:11 AM	Tube furnace set to 0
1/5/2011	10:58:11 AM	H2 valve closed
1/5/2011	10:58:11 AM	BCl3 valve closed
1/5/2011	10:58:11 AM	PH3 valve closed
1/5/2011	10:58:11 AM	SiCl4 pre valve closed
1/5/2011	10:58:11 AM	SiCl4 post valve closed
1/5/2011	10:58:11 AM	Bubbler valve closed
1/5/2011	10:58:11 AM	Helium valve opened
1/5/2011	10:58:11 AM	Main Vac valve opened
1/5/2011	10:58:11 AM	Bypass valve opened
1/5/2011	10:58:11 AM	Helium MFC set to  100.000000
1/5/2011	10:58:11 AM	H2 MFC set to  0.000000
1/5/2011	10:58:11 AM	BCl3 MFC set to  0.000000
1/5/2011	10:58:11 AM	PHl3 MFC set to  0.000000
1/5/2011	10:58:11 AM	SiCl4 MFC set to  0.000000
1/5/2011	10:58:11 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	10:58:12 AM	Tube furnace set to 0
1/5/2011	10:59:12 AM	Helium valve closed
1/5/2011	10:59:12 AM	H2 valve closed
1/5/2011	10:59:12 AM	BCl3 valve closed
1/5/2011	10:59:12 AM	PH3 valve closed
1/5/2011	10:59:12 AM	SiCl4 pre valve closed
1/5/2011	10:59:12 AM	SiCl4 post valve closed
1/5/2011	10:59:12 AM	Bubbler valve closed
1/5/2011	10:59:12 AM	Main Vac valve opened
1/5/2011	10:59:12 AM	Bypass valve opened
1/5/2011	10:59:12 AM	Helium MFC set to  0.000000
1/5/2011	10:59:12 AM	H2 MFC set to  0.000000
1/5/2011	10:59:12 AM	BCl3 MFC set to  0.000000
1/5/2011	10:59:12 AM	PHl3 MFC set to  0.000000
1/5/2011	10:59:12 AM	SiCl4 MFC set to  0.000000
1/5/2011	10:59:12 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	10:59:12 AM	Tube furnace set to 0
1/5/2011	11:00:12 AM	H2 valve closed
1/5/2011	11:00:12 AM	BCl3 valve closed
1/5/2011	11:00:12 AM	PH3 valve closed
1/5/2011	11:00:12 AM	SiCl4 pre valve closed
1/5/2011	11:00:12 AM	SiCl4 post valve closed
1/5/2011	11:00:12 AM	Bubbler valve closed
1/5/2011	11:00:12 AM	Helium valve opened
1/5/2011	11:00:12 AM	Main Vac valve opened
1/5/2011	11:00:12 AM	Bypass valve opened
1/5/2011	11:00:12 AM	Helium MFC set to  100.000000
1/5/2011	11:00:12 AM	H2 MFC set to  0.000000
1/5/2011	11:00:12 AM	BCl3 MFC set to  0.000000
1/5/2011	11:00:12 AM	PHl3 MFC set to  0.000000
1/5/2011	11:00:12 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:00:12 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:00:12 AM	Tube furnace set to 0
1/5/2011	11:01:12 AM	Helium valve closed
1/5/2011	11:01:12 AM	H2 valve closed
1/5/2011	11:01:12 AM	BCl3 valve closed
1/5/2011	11:01:12 AM	PH3 valve closed
1/5/2011	11:01:12 AM	SiCl4 pre valve closed
1/5/2011	11:01:12 AM	SiCl4 post valve closed
1/5/2011	11:01:12 AM	Bubbler valve closed
1/5/2011	11:01:12 AM	Main Vac valve opened
1/5/2011	11:01:12 AM	Bypass valve opened
1/5/2011	11:01:12 AM	Helium MFC set to  0.000000
1/5/2011	11:01:12 AM	H2 MFC set to  0.000000
1/5/2011	11:01:12 AM	BCl3 MFC set to  0.000000
1/5/2011	11:01:12 AM	PHl3 MFC set to  0.000000
1/5/2011	11:01:12 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:01:12 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:01:12 AM	Tube furnace set to 0
1/5/2011	11:02:12 AM	H2 valve closed
1/5/2011	11:02:12 AM	BCl3 valve closed
1/5/2011	11:02:12 AM	PH3 valve closed
1/5/2011	11:02:12 AM	SiCl4 pre valve closed
1/5/2011	11:02:12 AM	SiCl4 post valve closed
1/5/2011	11:02:12 AM	Bubbler valve closed
1/5/2011	11:02:12 AM	Helium valve opened
1/5/2011	11:02:12 AM	Main Vac valve opened
1/5/2011	11:02:12 AM	Bypass valve opened
1/5/2011	11:02:12 AM	Helium MFC set to  100.000000
1/5/2011	11:02:12 AM	H2 MFC set to  0.000000
1/5/2011	11:02:12 AM	BCl3 MFC set to  0.000000
1/5/2011	11:02:12 AM	PHl3 MFC set to  0.000000
1/5/2011	11:02:12 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:02:12 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:02:12 AM	Tube furnace set to 0
1/5/2011	11:03:12 AM	Helium valve closed
1/5/2011	11:03:12 AM	H2 valve closed
1/5/2011	11:03:12 AM	BCl3 valve closed
1/5/2011	11:03:12 AM	PH3 valve closed
1/5/2011	11:03:12 AM	SiCl4 pre valve closed
1/5/2011	11:03:12 AM	SiCl4 post valve closed
1/5/2011	11:03:12 AM	Bubbler valve closed
1/5/2011	11:03:12 AM	Main Vac valve opened
1/5/2011	11:03:12 AM	Bypass valve opened
1/5/2011	11:03:12 AM	Helium MFC set to  0.000000
1/5/2011	11:03:12 AM	H2 MFC set to  0.000000
1/5/2011	11:03:12 AM	BCl3 MFC set to  0.000000
1/5/2011	11:03:12 AM	PHl3 MFC set to  0.000000
1/5/2011	11:03:12 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:03:12 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:03:13 AM	Tube furnace set to 0
1/5/2011	11:04:13 AM	H2 valve closed
1/5/2011	11:04:13 AM	BCl3 valve closed
1/5/2011	11:04:13 AM	PH3 valve closed
1/5/2011	11:04:13 AM	SiCl4 pre valve closed
1/5/2011	11:04:13 AM	SiCl4 post valve closed
1/5/2011	11:04:13 AM	Bubbler valve closed
1/5/2011	11:04:13 AM	Helium valve opened
1/5/2011	11:04:13 AM	Main Vac valve opened
1/5/2011	11:04:13 AM	Bypass valve opened
1/5/2011	11:04:13 AM	Helium MFC set to  100.000000
1/5/2011	11:04:13 AM	H2 MFC set to  0.000000
1/5/2011	11:04:13 AM	BCl3 MFC set to  0.000000
1/5/2011	11:04:13 AM	PHl3 MFC set to  0.000000
1/5/2011	11:04:13 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:04:13 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:04:13 AM	Tube furnace set to 0
1/5/2011	11:05:13 AM	Helium valve closed
1/5/2011	11:05:13 AM	H2 valve closed
1/5/2011	11:05:13 AM	BCl3 valve closed
1/5/2011	11:05:13 AM	PH3 valve closed
1/5/2011	11:05:13 AM	SiCl4 pre valve closed
1/5/2011	11:05:13 AM	SiCl4 post valve closed
1/5/2011	11:05:13 AM	Bubbler valve closed
1/5/2011	11:05:13 AM	Main Vac valve opened
1/5/2011	11:05:13 AM	Bypass valve opened
1/5/2011	11:05:13 AM	Helium MFC set to  0.000000
1/5/2011	11:05:13 AM	H2 MFC set to  0.000000
1/5/2011	11:05:13 AM	BCl3 MFC set to  0.000000
1/5/2011	11:05:13 AM	PHl3 MFC set to  0.000000
1/5/2011	11:05:13 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:05:13 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:05:13 AM	Tube furnace set to 0
1/5/2011	11:06:13 AM	H2 valve closed
1/5/2011	11:06:13 AM	BCl3 valve closed
1/5/2011	11:06:13 AM	PH3 valve closed
1/5/2011	11:06:13 AM	SiCl4 pre valve closed
1/5/2011	11:06:13 AM	SiCl4 post valve closed
1/5/2011	11:06:13 AM	Bubbler valve closed
1/5/2011	11:06:13 AM	Helium valve opened
1/5/2011	11:06:13 AM	Main Vac valve opened
1/5/2011	11:06:13 AM	Bypass valve opened
1/5/2011	11:06:13 AM	Helium MFC set to  100.000000
1/5/2011	11:06:13 AM	H2 MFC set to  0.000000
1/5/2011	11:06:13 AM	BCl3 MFC set to  0.000000
1/5/2011	11:06:13 AM	PHl3 MFC set to  0.000000
1/5/2011	11:06:13 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:06:13 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:06:13 AM	Tube furnace set to 0
1/5/2011	11:07:13 AM	Helium valve closed
1/5/2011	11:07:13 AM	H2 valve closed
1/5/2011	11:07:13 AM	BCl3 valve closed
1/5/2011	11:07:13 AM	PH3 valve closed
1/5/2011	11:07:13 AM	SiCl4 pre valve closed
1/5/2011	11:07:13 AM	SiCl4 post valve closed
1/5/2011	11:07:13 AM	Bubbler valve closed
1/5/2011	11:07:13 AM	Main Vac valve opened
1/5/2011	11:07:13 AM	Bypass valve opened
1/5/2011	11:07:13 AM	Helium MFC set to  0.000000
1/5/2011	11:07:13 AM	H2 MFC set to  0.000000
1/5/2011	11:07:13 AM	BCl3 MFC set to  0.000000
1/5/2011	11:07:13 AM	PHl3 MFC set to  0.000000
1/5/2011	11:07:13 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:07:13 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:07:13 AM	Tube furnace set to 0
1/5/2011	11:08:13 AM	H2 valve closed
1/5/2011	11:08:13 AM	BCl3 valve closed
1/5/2011	11:08:13 AM	PH3 valve closed
1/5/2011	11:08:13 AM	SiCl4 pre valve closed
1/5/2011	11:08:13 AM	SiCl4 post valve closed
1/5/2011	11:08:13 AM	Bubbler valve closed
1/5/2011	11:08:13 AM	Helium valve opened
1/5/2011	11:08:13 AM	Main Vac valve opened
1/5/2011	11:08:13 AM	Bypass valve opened
1/5/2011	11:08:13 AM	Helium MFC set to  100.000000
1/5/2011	11:08:13 AM	H2 MFC set to  0.000000
1/5/2011	11:08:13 AM	BCl3 MFC set to  0.000000
1/5/2011	11:08:13 AM	PHl3 MFC set to  0.000000
1/5/2011	11:08:13 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:08:13 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:08:14 AM	Tube furnace set to 0
1/5/2011	11:09:14 AM	Helium valve closed
1/5/2011	11:09:14 AM	H2 valve closed
1/5/2011	11:09:14 AM	BCl3 valve closed
1/5/2011	11:09:14 AM	PH3 valve closed
1/5/2011	11:09:14 AM	SiCl4 pre valve closed
1/5/2011	11:09:14 AM	SiCl4 post valve closed
1/5/2011	11:09:14 AM	Bubbler valve closed
1/5/2011	11:09:14 AM	Main Vac valve opened
1/5/2011	11:09:14 AM	Bypass valve opened
1/5/2011	11:09:14 AM	Helium MFC set to  0.000000
1/5/2011	11:09:14 AM	H2 MFC set to  0.000000
1/5/2011	11:09:14 AM	BCl3 MFC set to  0.000000
1/5/2011	11:09:14 AM	PHl3 MFC set to  0.000000
1/5/2011	11:09:14 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:09:14 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:09:14 AM	Tube furnace set to 0
1/5/2011	11:10:14 AM	H2 valve closed
1/5/2011	11:10:14 AM	BCl3 valve closed
1/5/2011	11:10:14 AM	PH3 valve closed
1/5/2011	11:10:14 AM	SiCl4 pre valve closed
1/5/2011	11:10:14 AM	SiCl4 post valve closed
1/5/2011	11:10:14 AM	Bubbler valve closed
1/5/2011	11:10:14 AM	Helium valve opened
1/5/2011	11:10:14 AM	Main Vac valve opened
1/5/2011	11:10:14 AM	Bypass valve opened
1/5/2011	11:10:14 AM	Helium MFC set to  100.000000
1/5/2011	11:10:14 AM	H2 MFC set to  0.000000
1/5/2011	11:10:14 AM	BCl3 MFC set to  0.000000
1/5/2011	11:10:14 AM	PHl3 MFC set to  0.000000
1/5/2011	11:10:14 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:10:14 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:10:14 AM	Tube furnace set to 0
1/5/2011	11:11:14 AM	Helium valve closed
1/5/2011	11:11:14 AM	H2 valve closed
1/5/2011	11:11:14 AM	BCl3 valve closed
1/5/2011	11:11:14 AM	PH3 valve closed
1/5/2011	11:11:14 AM	SiCl4 pre valve closed
1/5/2011	11:11:14 AM	SiCl4 post valve closed
1/5/2011	11:11:14 AM	Bubbler valve closed
1/5/2011	11:11:14 AM	Main Vac valve opened
1/5/2011	11:11:14 AM	Bypass valve opened
1/5/2011	11:11:14 AM	Helium MFC set to  0.000000
1/5/2011	11:11:14 AM	H2 MFC set to  0.000000
1/5/2011	11:11:14 AM	BCl3 MFC set to  0.000000
1/5/2011	11:11:14 AM	PHl3 MFC set to  0.000000
1/5/2011	11:11:14 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:11:14 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:11:14 AM	Tube furnace set to 0
1/5/2011	11:12:14 AM	H2 valve closed
1/5/2011	11:12:14 AM	BCl3 valve closed
1/5/2011	11:12:14 AM	PH3 valve closed
1/5/2011	11:12:14 AM	SiCl4 pre valve closed
1/5/2011	11:12:14 AM	SiCl4 post valve closed
1/5/2011	11:12:14 AM	Bubbler valve closed
1/5/2011	11:12:14 AM	Helium valve opened
1/5/2011	11:12:14 AM	Main Vac valve opened
1/5/2011	11:12:14 AM	Bypass valve opened
1/5/2011	11:12:14 AM	Helium MFC set to  100.000000
1/5/2011	11:12:14 AM	H2 MFC set to  0.000000
1/5/2011	11:12:14 AM	BCl3 MFC set to  0.000000
1/5/2011	11:12:14 AM	PHl3 MFC set to  0.000000
1/5/2011	11:12:14 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:12:14 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:12:14 AM	Tube furnace set to 0
1/5/2011	11:13:14 AM	Helium valve closed
1/5/2011	11:13:14 AM	H2 valve closed
1/5/2011	11:13:14 AM	BCl3 valve closed
1/5/2011	11:13:14 AM	PH3 valve closed
1/5/2011	11:13:14 AM	SiCl4 pre valve closed
1/5/2011	11:13:14 AM	SiCl4 post valve closed
1/5/2011	11:13:14 AM	Bubbler valve closed
1/5/2011	11:13:14 AM	Main Vac valve opened
1/5/2011	11:13:14 AM	Bypass valve opened
1/5/2011	11:13:14 AM	Helium MFC set to  0.000000
1/5/2011	11:13:14 AM	H2 MFC set to  0.000000
1/5/2011	11:13:14 AM	BCl3 MFC set to  0.000000
1/5/2011	11:13:14 AM	PHl3 MFC set to  0.000000
1/5/2011	11:13:14 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:13:14 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:13:15 AM	Tube furnace set to 0
1/5/2011	11:13:16 AM	Run finished at 11:13 AM
1/5/2011	11:13:16 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/5/2011	11:24:41 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/5/2011	11:24:54 AM	Recipe started at 11:24 AM
1/5/2011	11:24:54 AM	Helium valve closed
1/5/2011	11:24:54 AM	H2 valve closed
1/5/2011	11:24:54 AM	BCl3 valve closed
1/5/2011	11:24:54 AM	PH3 valve closed
1/5/2011	11:24:54 AM	SiCl4 pre valve closed
1/5/2011	11:24:54 AM	SiCl4 post valve closed
1/5/2011	11:24:54 AM	Main Vac valve closed
1/5/2011	11:24:54 AM	Bubbler valve closed
1/5/2011	11:24:54 AM	Bypass valve opened
1/5/2011	11:24:54 AM	Helium MFC set to  0.000000
1/5/2011	11:24:54 AM	H2 MFC set to  0.000000
1/5/2011	11:24:54 AM	BCl3 MFC set to  0.000000
1/5/2011	11:24:54 AM	PHl3 MFC set to  0.000000
1/5/2011	11:24:54 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:24:54 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:24:54 AM	Tube furnace set to 0
1/5/2011	11:24:54 AM	Helium valve closed
1/5/2011	11:24:54 AM	H2 valve closed
1/5/2011	11:24:54 AM	BCl3 valve closed
1/5/2011	11:24:54 AM	PH3 valve closed
1/5/2011	11:24:54 AM	SiCl4 pre valve closed
1/5/2011	11:24:54 AM	SiCl4 post valve closed
1/5/2011	11:24:54 AM	Bubbler valve closed
1/5/2011	11:24:54 AM	Main Vac valve opened
1/5/2011	11:24:54 AM	Bypass valve opened
1/5/2011	11:24:54 AM	Helium MFC set to  0.000000
1/5/2011	11:24:54 AM	H2 MFC set to  0.000000
1/5/2011	11:24:54 AM	BCl3 MFC set to  0.000000
1/5/2011	11:24:54 AM	PHl3 MFC set to  0.000000
1/5/2011	11:24:54 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:24:54 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:24:54 AM	Tube furnace set to 0
1/5/2011	11:25:54 AM	H2 valve closed
1/5/2011	11:25:54 AM	BCl3 valve closed
1/5/2011	11:25:54 AM	PH3 valve closed
1/5/2011	11:25:54 AM	SiCl4 pre valve closed
1/5/2011	11:25:54 AM	SiCl4 post valve closed
1/5/2011	11:25:54 AM	Bubbler valve closed
1/5/2011	11:25:54 AM	Helium valve opened
1/5/2011	11:25:54 AM	Main Vac valve opened
1/5/2011	11:25:54 AM	Bypass valve opened
1/5/2011	11:25:54 AM	Helium MFC set to  100.000000
1/5/2011	11:25:54 AM	H2 MFC set to  0.000000
1/5/2011	11:25:54 AM	BCl3 MFC set to  0.000000
1/5/2011	11:25:54 AM	PHl3 MFC set to  0.000000
1/5/2011	11:25:54 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:25:54 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:25:55 AM	Tube furnace set to 0
1/5/2011	11:26:55 AM	Helium valve closed
1/5/2011	11:26:55 AM	H2 valve closed
1/5/2011	11:26:55 AM	BCl3 valve closed
1/5/2011	11:26:55 AM	PH3 valve closed
1/5/2011	11:26:55 AM	SiCl4 pre valve closed
1/5/2011	11:26:55 AM	SiCl4 post valve closed
1/5/2011	11:26:55 AM	Bubbler valve closed
1/5/2011	11:26:55 AM	Main Vac valve opened
1/5/2011	11:26:55 AM	Bypass valve opened
1/5/2011	11:26:55 AM	Helium MFC set to  0.000000
1/5/2011	11:26:55 AM	H2 MFC set to  0.000000
1/5/2011	11:26:55 AM	BCl3 MFC set to  0.000000
1/5/2011	11:26:55 AM	PHl3 MFC set to  0.000000
1/5/2011	11:26:55 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:26:55 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:26:55 AM	Tube furnace set to 0
1/5/2011	11:27:55 AM	H2 valve closed
1/5/2011	11:27:55 AM	BCl3 valve closed
1/5/2011	11:27:55 AM	PH3 valve closed
1/5/2011	11:27:55 AM	SiCl4 pre valve closed
1/5/2011	11:27:55 AM	SiCl4 post valve closed
1/5/2011	11:27:55 AM	Bubbler valve closed
1/5/2011	11:27:55 AM	Helium valve opened
1/5/2011	11:27:55 AM	Main Vac valve opened
1/5/2011	11:27:55 AM	Bypass valve opened
1/5/2011	11:27:55 AM	Helium MFC set to  100.000000
1/5/2011	11:27:55 AM	H2 MFC set to  0.000000
1/5/2011	11:27:55 AM	BCl3 MFC set to  0.000000
1/5/2011	11:27:55 AM	PHl3 MFC set to  0.000000
1/5/2011	11:27:55 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:27:55 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:27:55 AM	Tube furnace set to 0
1/5/2011	11:28:55 AM	Helium valve closed
1/5/2011	11:28:55 AM	H2 valve closed
1/5/2011	11:28:55 AM	BCl3 valve closed
1/5/2011	11:28:55 AM	PH3 valve closed
1/5/2011	11:28:55 AM	SiCl4 pre valve closed
1/5/2011	11:28:55 AM	SiCl4 post valve closed
1/5/2011	11:28:55 AM	Bubbler valve closed
1/5/2011	11:28:55 AM	Main Vac valve opened
1/5/2011	11:28:55 AM	Bypass valve opened
1/5/2011	11:28:55 AM	Helium MFC set to  0.000000
1/5/2011	11:28:55 AM	H2 MFC set to  0.000000
1/5/2011	11:28:55 AM	BCl3 MFC set to  0.000000
1/5/2011	11:28:55 AM	PHl3 MFC set to  0.000000
1/5/2011	11:28:55 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:28:55 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:28:55 AM	Tube furnace set to 0
1/5/2011	11:29:55 AM	H2 valve closed
1/5/2011	11:29:55 AM	BCl3 valve closed
1/5/2011	11:29:55 AM	PH3 valve closed
1/5/2011	11:29:55 AM	SiCl4 pre valve closed
1/5/2011	11:29:55 AM	SiCl4 post valve closed
1/5/2011	11:29:55 AM	Bubbler valve closed
1/5/2011	11:29:55 AM	Helium valve opened
1/5/2011	11:29:55 AM	Main Vac valve opened
1/5/2011	11:29:55 AM	Bypass valve opened
1/5/2011	11:29:55 AM	Helium MFC set to  100.000000
1/5/2011	11:29:55 AM	H2 MFC set to  0.000000
1/5/2011	11:29:55 AM	BCl3 MFC set to  0.000000
1/5/2011	11:29:55 AM	PHl3 MFC set to  0.000000
1/5/2011	11:29:55 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:29:55 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:29:55 AM	Tube furnace set to 0
1/5/2011	11:30:55 AM	Helium valve closed
1/5/2011	11:30:55 AM	H2 valve closed
1/5/2011	11:30:55 AM	BCl3 valve closed
1/5/2011	11:30:55 AM	PH3 valve closed
1/5/2011	11:30:55 AM	SiCl4 pre valve closed
1/5/2011	11:30:55 AM	SiCl4 post valve closed
1/5/2011	11:30:55 AM	Bubbler valve closed
1/5/2011	11:30:55 AM	Main Vac valve opened
1/5/2011	11:30:55 AM	Bypass valve opened
1/5/2011	11:30:55 AM	Helium MFC set to  0.000000
1/5/2011	11:30:55 AM	H2 MFC set to  0.000000
1/5/2011	11:30:55 AM	BCl3 MFC set to  0.000000
1/5/2011	11:30:55 AM	PHl3 MFC set to  0.000000
1/5/2011	11:30:55 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:30:55 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:30:56 AM	Tube furnace set to 0
1/5/2011	11:31:56 AM	H2 valve closed
1/5/2011	11:31:56 AM	BCl3 valve closed
1/5/2011	11:31:56 AM	PH3 valve closed
1/5/2011	11:31:56 AM	SiCl4 pre valve closed
1/5/2011	11:31:56 AM	SiCl4 post valve closed
1/5/2011	11:31:56 AM	Bubbler valve closed
1/5/2011	11:31:56 AM	Helium valve opened
1/5/2011	11:31:56 AM	Main Vac valve opened
1/5/2011	11:31:56 AM	Bypass valve opened
1/5/2011	11:31:56 AM	Helium MFC set to  100.000000
1/5/2011	11:31:56 AM	H2 MFC set to  0.000000
1/5/2011	11:31:56 AM	BCl3 MFC set to  0.000000
1/5/2011	11:31:56 AM	PHl3 MFC set to  0.000000
1/5/2011	11:31:56 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:31:56 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:31:56 AM	Tube furnace set to 0
1/5/2011	11:32:56 AM	Helium valve closed
1/5/2011	11:32:56 AM	H2 valve closed
1/5/2011	11:32:56 AM	BCl3 valve closed
1/5/2011	11:32:56 AM	PH3 valve closed
1/5/2011	11:32:56 AM	SiCl4 pre valve closed
1/5/2011	11:32:56 AM	SiCl4 post valve closed
1/5/2011	11:32:56 AM	Bubbler valve closed
1/5/2011	11:32:56 AM	Main Vac valve opened
1/5/2011	11:32:56 AM	Bypass valve opened
1/5/2011	11:32:56 AM	Helium MFC set to  0.000000
1/5/2011	11:32:56 AM	H2 MFC set to  0.000000
1/5/2011	11:32:56 AM	BCl3 MFC set to  0.000000
1/5/2011	11:32:56 AM	PHl3 MFC set to  0.000000
1/5/2011	11:32:56 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:32:56 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:32:56 AM	Tube furnace set to 0
1/5/2011	11:33:56 AM	H2 valve closed
1/5/2011	11:33:56 AM	BCl3 valve closed
1/5/2011	11:33:56 AM	PH3 valve closed
1/5/2011	11:33:56 AM	SiCl4 pre valve closed
1/5/2011	11:33:56 AM	SiCl4 post valve closed
1/5/2011	11:33:56 AM	Bubbler valve closed
1/5/2011	11:33:56 AM	Helium valve opened
1/5/2011	11:33:56 AM	Main Vac valve opened
1/5/2011	11:33:56 AM	Bypass valve opened
1/5/2011	11:33:56 AM	Helium MFC set to  100.000000
1/5/2011	11:33:56 AM	H2 MFC set to  0.000000
1/5/2011	11:33:56 AM	BCl3 MFC set to  0.000000
1/5/2011	11:33:56 AM	PHl3 MFC set to  0.000000
1/5/2011	11:33:56 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:33:56 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:33:56 AM	Tube furnace set to 0
1/5/2011	11:34:56 AM	Helium valve closed
1/5/2011	11:34:56 AM	H2 valve closed
1/5/2011	11:34:56 AM	BCl3 valve closed
1/5/2011	11:34:56 AM	PH3 valve closed
1/5/2011	11:34:56 AM	SiCl4 pre valve closed
1/5/2011	11:34:56 AM	SiCl4 post valve closed
1/5/2011	11:34:56 AM	Bubbler valve closed
1/5/2011	11:34:56 AM	Main Vac valve opened
1/5/2011	11:34:56 AM	Bypass valve opened
1/5/2011	11:34:56 AM	Helium MFC set to  0.000000
1/5/2011	11:34:56 AM	H2 MFC set to  0.000000
1/5/2011	11:34:56 AM	BCl3 MFC set to  0.000000
1/5/2011	11:34:56 AM	PHl3 MFC set to  0.000000
1/5/2011	11:34:56 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:34:56 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:34:56 AM	Tube furnace set to 0
1/5/2011	11:35:56 AM	H2 valve closed
1/5/2011	11:35:56 AM	BCl3 valve closed
1/5/2011	11:35:56 AM	PH3 valve closed
1/5/2011	11:35:56 AM	SiCl4 pre valve closed
1/5/2011	11:35:56 AM	SiCl4 post valve closed
1/5/2011	11:35:56 AM	Bubbler valve closed
1/5/2011	11:35:56 AM	Helium valve opened
1/5/2011	11:35:56 AM	Main Vac valve opened
1/5/2011	11:35:56 AM	Bypass valve opened
1/5/2011	11:35:56 AM	Helium MFC set to  100.000000
1/5/2011	11:35:56 AM	H2 MFC set to  0.000000
1/5/2011	11:35:56 AM	BCl3 MFC set to  0.000000
1/5/2011	11:35:56 AM	PHl3 MFC set to  0.000000
1/5/2011	11:35:56 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:35:56 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:35:57 AM	Tube furnace set to 0
1/5/2011	11:36:57 AM	Helium valve closed
1/5/2011	11:36:57 AM	H2 valve closed
1/5/2011	11:36:57 AM	BCl3 valve closed
1/5/2011	11:36:57 AM	PH3 valve closed
1/5/2011	11:36:57 AM	SiCl4 pre valve closed
1/5/2011	11:36:57 AM	SiCl4 post valve closed
1/5/2011	11:36:57 AM	Bubbler valve closed
1/5/2011	11:36:57 AM	Main Vac valve opened
1/5/2011	11:36:57 AM	Bypass valve opened
1/5/2011	11:36:57 AM	Helium MFC set to  0.000000
1/5/2011	11:36:57 AM	H2 MFC set to  0.000000
1/5/2011	11:36:57 AM	BCl3 MFC set to  0.000000
1/5/2011	11:36:57 AM	PHl3 MFC set to  0.000000
1/5/2011	11:36:57 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:36:57 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:36:57 AM	Tube furnace set to 0
1/5/2011	11:37:57 AM	H2 valve closed
1/5/2011	11:37:57 AM	BCl3 valve closed
1/5/2011	11:37:57 AM	PH3 valve closed
1/5/2011	11:37:57 AM	SiCl4 pre valve closed
1/5/2011	11:37:57 AM	SiCl4 post valve closed
1/5/2011	11:37:57 AM	Bubbler valve closed
1/5/2011	11:37:57 AM	Helium valve opened
1/5/2011	11:37:57 AM	Main Vac valve opened
1/5/2011	11:37:57 AM	Bypass valve opened
1/5/2011	11:37:57 AM	Helium MFC set to  100.000000
1/5/2011	11:37:57 AM	H2 MFC set to  0.000000
1/5/2011	11:37:57 AM	BCl3 MFC set to  0.000000
1/5/2011	11:37:57 AM	PHl3 MFC set to  0.000000
1/5/2011	11:37:57 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:37:57 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:37:57 AM	Tube furnace set to 0
1/5/2011	11:38:57 AM	Helium valve closed
1/5/2011	11:38:57 AM	H2 valve closed
1/5/2011	11:38:57 AM	BCl3 valve closed
1/5/2011	11:38:57 AM	PH3 valve closed
1/5/2011	11:38:57 AM	SiCl4 pre valve closed
1/5/2011	11:38:57 AM	SiCl4 post valve closed
1/5/2011	11:38:57 AM	Bubbler valve closed
1/5/2011	11:38:57 AM	Main Vac valve opened
1/5/2011	11:38:57 AM	Bypass valve opened
1/5/2011	11:38:57 AM	Helium MFC set to  0.000000
1/5/2011	11:38:57 AM	H2 MFC set to  0.000000
1/5/2011	11:38:57 AM	BCl3 MFC set to  0.000000
1/5/2011	11:38:57 AM	PHl3 MFC set to  0.000000
1/5/2011	11:38:57 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:38:57 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:38:57 AM	Tube furnace set to 0
1/5/2011	11:39:57 AM	H2 valve closed
1/5/2011	11:39:57 AM	BCl3 valve closed
1/5/2011	11:39:57 AM	PH3 valve closed
1/5/2011	11:39:57 AM	SiCl4 pre valve closed
1/5/2011	11:39:57 AM	SiCl4 post valve closed
1/5/2011	11:39:57 AM	Bubbler valve closed
1/5/2011	11:39:57 AM	Helium valve opened
1/5/2011	11:39:57 AM	Main Vac valve opened
1/5/2011	11:39:57 AM	Bypass valve opened
1/5/2011	11:39:57 AM	Helium MFC set to  100.000000
1/5/2011	11:39:57 AM	H2 MFC set to  0.000000
1/5/2011	11:39:57 AM	BCl3 MFC set to  0.000000
1/5/2011	11:39:57 AM	PHl3 MFC set to  0.000000
1/5/2011	11:39:57 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:39:57 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:39:57 AM	Tube furnace set to 0
1/5/2011	11:40:57 AM	Helium valve closed
1/5/2011	11:40:57 AM	H2 valve closed
1/5/2011	11:40:57 AM	BCl3 valve closed
1/5/2011	11:40:57 AM	PH3 valve closed
1/5/2011	11:40:57 AM	SiCl4 pre valve closed
1/5/2011	11:40:57 AM	SiCl4 post valve closed
1/5/2011	11:40:57 AM	Bubbler valve closed
1/5/2011	11:40:57 AM	Main Vac valve opened
1/5/2011	11:40:57 AM	Bypass valve opened
1/5/2011	11:40:57 AM	Helium MFC set to  0.000000
1/5/2011	11:40:57 AM	H2 MFC set to  0.000000
1/5/2011	11:40:57 AM	BCl3 MFC set to  0.000000
1/5/2011	11:40:58 AM	PHl3 MFC set to  0.000000
1/5/2011	11:40:58 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:40:58 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:40:58 AM	Tube furnace set to 0
1/5/2011	11:41:58 AM	H2 valve closed
1/5/2011	11:41:58 AM	BCl3 valve closed
1/5/2011	11:41:58 AM	PH3 valve closed
1/5/2011	11:41:58 AM	SiCl4 pre valve closed
1/5/2011	11:41:58 AM	SiCl4 post valve closed
1/5/2011	11:41:58 AM	Bubbler valve closed
1/5/2011	11:41:58 AM	Helium valve opened
1/5/2011	11:41:58 AM	Main Vac valve opened
1/5/2011	11:41:58 AM	Bypass valve opened
1/5/2011	11:41:58 AM	Helium MFC set to  100.000000
1/5/2011	11:41:58 AM	H2 MFC set to  0.000000
1/5/2011	11:41:58 AM	BCl3 MFC set to  0.000000
1/5/2011	11:41:58 AM	PHl3 MFC set to  0.000000
1/5/2011	11:41:58 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:41:58 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:41:58 AM	Tube furnace set to 0
1/5/2011	11:42:58 AM	Helium valve closed
1/5/2011	11:42:58 AM	H2 valve closed
1/5/2011	11:42:58 AM	BCl3 valve closed
1/5/2011	11:42:58 AM	PH3 valve closed
1/5/2011	11:42:58 AM	SiCl4 pre valve closed
1/5/2011	11:42:58 AM	SiCl4 post valve closed
1/5/2011	11:42:58 AM	Bubbler valve closed
1/5/2011	11:42:58 AM	Main Vac valve opened
1/5/2011	11:42:58 AM	Bypass valve opened
1/5/2011	11:42:58 AM	Helium MFC set to  0.000000
1/5/2011	11:42:58 AM	H2 MFC set to  0.000000
1/5/2011	11:42:58 AM	BCl3 MFC set to  0.000000
1/5/2011	11:42:58 AM	PHl3 MFC set to  0.000000
1/5/2011	11:42:58 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:42:58 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:42:58 AM	Tube furnace set to 0
1/5/2011	11:43:58 AM	H2 valve closed
1/5/2011	11:43:58 AM	BCl3 valve closed
1/5/2011	11:43:58 AM	PH3 valve closed
1/5/2011	11:43:58 AM	SiCl4 pre valve closed
1/5/2011	11:43:58 AM	SiCl4 post valve closed
1/5/2011	11:43:58 AM	Bubbler valve closed
1/5/2011	11:43:58 AM	Helium valve opened
1/5/2011	11:43:58 AM	Main Vac valve opened
1/5/2011	11:43:58 AM	Bypass valve opened
1/5/2011	11:43:58 AM	Helium MFC set to  100.000000
1/5/2011	11:43:58 AM	H2 MFC set to  0.000000
1/5/2011	11:43:58 AM	BCl3 MFC set to  0.000000
1/5/2011	11:43:58 AM	PHl3 MFC set to  0.000000
1/5/2011	11:43:58 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:43:58 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:43:58 AM	Tube furnace set to 0
1/5/2011	11:44:58 AM	Helium valve closed
1/5/2011	11:44:58 AM	H2 valve closed
1/5/2011	11:44:58 AM	BCl3 valve closed
1/5/2011	11:44:58 AM	PH3 valve closed
1/5/2011	11:44:58 AM	SiCl4 pre valve closed
1/5/2011	11:44:58 AM	SiCl4 post valve closed
1/5/2011	11:44:58 AM	Bubbler valve closed
1/5/2011	11:44:58 AM	Main Vac valve opened
1/5/2011	11:44:58 AM	Bypass valve opened
1/5/2011	11:44:58 AM	Helium MFC set to  0.000000
1/5/2011	11:44:58 AM	H2 MFC set to  0.000000
1/5/2011	11:44:58 AM	BCl3 MFC set to  0.000000
1/5/2011	11:44:58 AM	PHl3 MFC set to  0.000000
1/5/2011	11:44:58 AM	SiCl4 MFC set to  0.000000
1/5/2011	11:44:58 AM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:44:59 AM	Tube furnace set to 0
1/5/2011	11:45:00 AM	Run finished at 11:45 AM
1/5/2011	11:45:00 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/5/2011	12:00:15 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/5/2011	12:00:15 PM	Recipe started at 12:00 PM
1/5/2011	12:00:15 PM	Helium valve closed
1/5/2011	12:00:15 PM	H2 valve closed
1/5/2011	12:00:15 PM	BCl3 valve closed
1/5/2011	12:00:15 PM	PH3 valve closed
1/5/2011	12:00:15 PM	SiCl4 pre valve closed
1/5/2011	12:00:15 PM	SiCl4 post valve closed
1/5/2011	12:00:15 PM	Main Vac valve closed
1/5/2011	12:00:15 PM	Bypass valve closed
1/5/2011	12:00:15 PM	Bubbler valve closed
1/5/2011	12:00:15 PM	Helium MFC set to  0.000000
1/5/2011	12:00:15 PM	H2 MFC set to  0.000000
1/5/2011	12:00:15 PM	BCl3 MFC set to  0.000000
1/5/2011	12:00:15 PM	PHl3 MFC set to  0.000000
1/5/2011	12:00:15 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:00:15 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:00:16 PM	Tube furnace set to 0
1/5/2011	12:00:16 PM	Run finished at 12:00 PM
1/5/2011	12:00:16 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\close_valves_and_mfc.xml
1/5/2011	12:00:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/5/2011	12:00:40 PM	Recipe started at 12:00 PM
1/5/2011	12:00:40 PM	Helium valve closed
1/5/2011	12:00:40 PM	H2 valve closed
1/5/2011	12:00:40 PM	BCl3 valve closed
1/5/2011	12:00:40 PM	PH3 valve closed
1/5/2011	12:00:40 PM	SiCl4 pre valve closed
1/5/2011	12:00:40 PM	SiCl4 post valve closed
1/5/2011	12:00:40 PM	Main Vac valve closed
1/5/2011	12:00:40 PM	Bubbler valve closed
1/5/2011	12:00:40 PM	Bypass valve opened
1/5/2011	12:00:40 PM	Helium MFC set to  0.000000
1/5/2011	12:00:40 PM	H2 MFC set to  0.000000
1/5/2011	12:00:40 PM	BCl3 MFC set to  0.000000
1/5/2011	12:00:40 PM	PHl3 MFC set to  0.000000
1/5/2011	12:00:40 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:00:40 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:00:40 PM	Tube furnace set to 0
1/5/2011	12:00:40 PM	Helium valve closed
1/5/2011	12:00:40 PM	H2 valve closed
1/5/2011	12:00:40 PM	BCl3 valve closed
1/5/2011	12:00:40 PM	PH3 valve closed
1/5/2011	12:00:40 PM	SiCl4 pre valve closed
1/5/2011	12:00:40 PM	SiCl4 post valve closed
1/5/2011	12:00:40 PM	Bubbler valve closed
1/5/2011	12:00:40 PM	Main Vac valve opened
1/5/2011	12:00:40 PM	Bypass valve opened
1/5/2011	12:00:40 PM	Helium MFC set to  0.000000
1/5/2011	12:00:40 PM	H2 MFC set to  0.000000
1/5/2011	12:00:40 PM	BCl3 MFC set to  0.000000
1/5/2011	12:00:40 PM	PHl3 MFC set to  0.000000
1/5/2011	12:00:40 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:00:40 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:00:40 PM	Tube furnace set to 0
1/5/2011	12:00:41 PM	Run finished at 12:00 PM
1/5/2011	12:00:41 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/5/2011	12:27:36 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/5/2011	12:27:48 PM	Recipe started at 12:27 PM
1/5/2011	12:27:48 PM	Helium valve closed
1/5/2011	12:27:48 PM	H2 valve closed
1/5/2011	12:27:48 PM	BCl3 valve closed
1/5/2011	12:27:48 PM	PH3 valve closed
1/5/2011	12:27:48 PM	SiCl4 pre valve closed
1/5/2011	12:27:48 PM	SiCl4 post valve closed
1/5/2011	12:27:48 PM	Main Vac valve closed
1/5/2011	12:27:48 PM	Bubbler valve closed
1/5/2011	12:27:48 PM	Bypass valve opened
1/5/2011	12:27:48 PM	Helium MFC set to  0.000000
1/5/2011	12:27:48 PM	H2 MFC set to  0.000000
1/5/2011	12:27:48 PM	BCl3 MFC set to  0.000000
1/5/2011	12:27:48 PM	PHl3 MFC set to  0.000000
1/5/2011	12:27:48 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:27:48 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:27:48 PM	Tube furnace set to 0
1/5/2011	12:27:49 PM	Helium valve closed
1/5/2011	12:27:49 PM	H2 valve closed
1/5/2011	12:27:49 PM	BCl3 valve closed
1/5/2011	12:27:49 PM	PH3 valve closed
1/5/2011	12:27:49 PM	SiCl4 pre valve closed
1/5/2011	12:27:49 PM	SiCl4 post valve closed
1/5/2011	12:27:49 PM	Bubbler valve closed
1/5/2011	12:27:49 PM	Main Vac valve opened
1/5/2011	12:27:49 PM	Bypass valve opened
1/5/2011	12:27:49 PM	Helium MFC set to  0.000000
1/5/2011	12:27:49 PM	H2 MFC set to  0.000000
1/5/2011	12:27:49 PM	BCl3 MFC set to  0.000000
1/5/2011	12:27:49 PM	PHl3 MFC set to  0.000000
1/5/2011	12:27:49 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:27:49 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:27:49 PM	Tube furnace set to 0
1/5/2011	12:28:49 PM	H2 valve closed
1/5/2011	12:28:49 PM	BCl3 valve closed
1/5/2011	12:28:49 PM	PH3 valve closed
1/5/2011	12:28:49 PM	SiCl4 pre valve closed
1/5/2011	12:28:49 PM	SiCl4 post valve closed
1/5/2011	12:28:49 PM	Bubbler valve closed
1/5/2011	12:28:49 PM	Helium valve opened
1/5/2011	12:28:49 PM	Main Vac valve opened
1/5/2011	12:28:49 PM	Bypass valve opened
1/5/2011	12:28:49 PM	Helium MFC set to  100.000000
1/5/2011	12:28:49 PM	H2 MFC set to  0.000000
1/5/2011	12:28:49 PM	BCl3 MFC set to  0.000000
1/5/2011	12:28:49 PM	PHl3 MFC set to  0.000000
1/5/2011	12:28:49 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:28:49 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:28:49 PM	Tube furnace set to 0
1/5/2011	12:29:49 PM	Helium valve closed
1/5/2011	12:29:49 PM	H2 valve closed
1/5/2011	12:29:49 PM	BCl3 valve closed
1/5/2011	12:29:49 PM	PH3 valve closed
1/5/2011	12:29:49 PM	SiCl4 pre valve closed
1/5/2011	12:29:49 PM	SiCl4 post valve closed
1/5/2011	12:29:49 PM	Bubbler valve closed
1/5/2011	12:29:49 PM	Main Vac valve opened
1/5/2011	12:29:49 PM	Bypass valve opened
1/5/2011	12:29:49 PM	Helium MFC set to  0.000000
1/5/2011	12:29:49 PM	H2 MFC set to  0.000000
1/5/2011	12:29:49 PM	BCl3 MFC set to  0.000000
1/5/2011	12:29:49 PM	PHl3 MFC set to  0.000000
1/5/2011	12:29:49 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:29:49 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:29:49 PM	Tube furnace set to 0
1/5/2011	12:30:49 PM	H2 valve closed
1/5/2011	12:30:49 PM	BCl3 valve closed
1/5/2011	12:30:49 PM	PH3 valve closed
1/5/2011	12:30:49 PM	SiCl4 pre valve closed
1/5/2011	12:30:49 PM	SiCl4 post valve closed
1/5/2011	12:30:49 PM	Bubbler valve closed
1/5/2011	12:30:49 PM	Helium valve opened
1/5/2011	12:30:49 PM	Main Vac valve opened
1/5/2011	12:30:49 PM	Bypass valve opened
1/5/2011	12:30:49 PM	Helium MFC set to  100.000000
1/5/2011	12:30:49 PM	H2 MFC set to  0.000000
1/5/2011	12:30:49 PM	BCl3 MFC set to  0.000000
1/5/2011	12:30:49 PM	PHl3 MFC set to  0.000000
1/5/2011	12:30:49 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:30:49 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:30:49 PM	Tube furnace set to 0
1/5/2011	12:31:50 PM	Helium valve closed
1/5/2011	12:31:50 PM	H2 valve closed
1/5/2011	12:31:50 PM	BCl3 valve closed
1/5/2011	12:31:50 PM	PH3 valve closed
1/5/2011	12:31:50 PM	SiCl4 pre valve closed
1/5/2011	12:31:50 PM	SiCl4 post valve closed
1/5/2011	12:31:50 PM	Bubbler valve closed
1/5/2011	12:31:50 PM	Main Vac valve opened
1/5/2011	12:31:50 PM	Bypass valve opened
1/5/2011	12:31:50 PM	Helium MFC set to  0.000000
1/5/2011	12:31:50 PM	H2 MFC set to  0.000000
1/5/2011	12:31:50 PM	BCl3 MFC set to  0.000000
1/5/2011	12:31:50 PM	PHl3 MFC set to  0.000000
1/5/2011	12:31:50 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:31:50 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:31:50 PM	Tube furnace set to 0
1/5/2011	12:32:50 PM	H2 valve closed
1/5/2011	12:32:50 PM	BCl3 valve closed
1/5/2011	12:32:50 PM	PH3 valve closed
1/5/2011	12:32:50 PM	SiCl4 pre valve closed
1/5/2011	12:32:50 PM	SiCl4 post valve closed
1/5/2011	12:32:50 PM	Bubbler valve closed
1/5/2011	12:32:50 PM	Helium valve opened
1/5/2011	12:32:50 PM	Main Vac valve opened
1/5/2011	12:32:50 PM	Bypass valve opened
1/5/2011	12:32:50 PM	Helium MFC set to  100.000000
1/5/2011	12:32:50 PM	H2 MFC set to  0.000000
1/5/2011	12:32:50 PM	BCl3 MFC set to  0.000000
1/5/2011	12:32:50 PM	PHl3 MFC set to  0.000000
1/5/2011	12:32:50 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:32:50 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:32:50 PM	Tube furnace set to 0
1/5/2011	12:33:50 PM	Helium valve closed
1/5/2011	12:33:50 PM	H2 valve closed
1/5/2011	12:33:50 PM	BCl3 valve closed
1/5/2011	12:33:50 PM	PH3 valve closed
1/5/2011	12:33:50 PM	SiCl4 pre valve closed
1/5/2011	12:33:50 PM	SiCl4 post valve closed
1/5/2011	12:33:50 PM	Bubbler valve closed
1/5/2011	12:33:50 PM	Main Vac valve opened
1/5/2011	12:33:50 PM	Bypass valve opened
1/5/2011	12:33:50 PM	Helium MFC set to  0.000000
1/5/2011	12:33:50 PM	H2 MFC set to  0.000000
1/5/2011	12:33:50 PM	BCl3 MFC set to  0.000000
1/5/2011	12:33:50 PM	PHl3 MFC set to  0.000000
1/5/2011	12:33:50 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:33:50 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:33:50 PM	Tube furnace set to 0
1/5/2011	12:34:50 PM	H2 valve closed
1/5/2011	12:34:50 PM	BCl3 valve closed
1/5/2011	12:34:50 PM	PH3 valve closed
1/5/2011	12:34:50 PM	SiCl4 pre valve closed
1/5/2011	12:34:50 PM	SiCl4 post valve closed
1/5/2011	12:34:50 PM	Bubbler valve closed
1/5/2011	12:34:50 PM	Helium valve opened
1/5/2011	12:34:50 PM	Main Vac valve opened
1/5/2011	12:34:50 PM	Bypass valve opened
1/5/2011	12:34:50 PM	Helium MFC set to  100.000000
1/5/2011	12:34:50 PM	H2 MFC set to  0.000000
1/5/2011	12:34:50 PM	BCl3 MFC set to  0.000000
1/5/2011	12:34:50 PM	PHl3 MFC set to  0.000000
1/5/2011	12:34:50 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:34:50 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:34:50 PM	Tube furnace set to 0
1/5/2011	12:35:50 PM	Helium valve closed
1/5/2011	12:35:50 PM	H2 valve closed
1/5/2011	12:35:50 PM	BCl3 valve closed
1/5/2011	12:35:50 PM	PH3 valve closed
1/5/2011	12:35:50 PM	SiCl4 pre valve closed
1/5/2011	12:35:50 PM	SiCl4 post valve closed
1/5/2011	12:35:50 PM	Bubbler valve closed
1/5/2011	12:35:50 PM	Main Vac valve opened
1/5/2011	12:35:50 PM	Bypass valve opened
1/5/2011	12:35:50 PM	Helium MFC set to  0.000000
1/5/2011	12:35:50 PM	H2 MFC set to  0.000000
1/5/2011	12:35:50 PM	BCl3 MFC set to  0.000000
1/5/2011	12:35:50 PM	PHl3 MFC set to  0.000000
1/5/2011	12:35:50 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:35:50 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:35:51 PM	Tube furnace set to 0
1/5/2011	12:36:51 PM	H2 valve closed
1/5/2011	12:36:51 PM	BCl3 valve closed
1/5/2011	12:36:51 PM	PH3 valve closed
1/5/2011	12:36:51 PM	SiCl4 pre valve closed
1/5/2011	12:36:51 PM	SiCl4 post valve closed
1/5/2011	12:36:51 PM	Bubbler valve closed
1/5/2011	12:36:51 PM	Helium valve opened
1/5/2011	12:36:51 PM	Main Vac valve opened
1/5/2011	12:36:51 PM	Bypass valve opened
1/5/2011	12:36:51 PM	Helium MFC set to  100.000000
1/5/2011	12:36:51 PM	H2 MFC set to  0.000000
1/5/2011	12:36:51 PM	BCl3 MFC set to  0.000000
1/5/2011	12:36:51 PM	PHl3 MFC set to  0.000000
1/5/2011	12:36:51 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:36:51 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:36:51 PM	Tube furnace set to 0
1/5/2011	12:37:51 PM	Helium valve closed
1/5/2011	12:37:51 PM	H2 valve closed
1/5/2011	12:37:51 PM	BCl3 valve closed
1/5/2011	12:37:51 PM	PH3 valve closed
1/5/2011	12:37:51 PM	SiCl4 pre valve closed
1/5/2011	12:37:51 PM	SiCl4 post valve closed
1/5/2011	12:37:51 PM	Bubbler valve closed
1/5/2011	12:37:51 PM	Main Vac valve opened
1/5/2011	12:37:51 PM	Bypass valve opened
1/5/2011	12:37:51 PM	Helium MFC set to  0.000000
1/5/2011	12:37:51 PM	H2 MFC set to  0.000000
1/5/2011	12:37:51 PM	BCl3 MFC set to  0.000000
1/5/2011	12:37:51 PM	PHl3 MFC set to  0.000000
1/5/2011	12:37:51 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:37:51 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:37:51 PM	Tube furnace set to 0
1/5/2011	12:38:51 PM	H2 valve closed
1/5/2011	12:38:51 PM	BCl3 valve closed
1/5/2011	12:38:51 PM	PH3 valve closed
1/5/2011	12:38:51 PM	SiCl4 pre valve closed
1/5/2011	12:38:51 PM	SiCl4 post valve closed
1/5/2011	12:38:51 PM	Bubbler valve closed
1/5/2011	12:38:51 PM	Helium valve opened
1/5/2011	12:38:51 PM	Main Vac valve opened
1/5/2011	12:38:51 PM	Bypass valve opened
1/5/2011	12:38:51 PM	Helium MFC set to  100.000000
1/5/2011	12:38:51 PM	H2 MFC set to  0.000000
1/5/2011	12:38:51 PM	BCl3 MFC set to  0.000000
1/5/2011	12:38:51 PM	PHl3 MFC set to  0.000000
1/5/2011	12:38:51 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:38:51 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:38:51 PM	Tube furnace set to 0
1/5/2011	12:39:51 PM	Helium valve closed
1/5/2011	12:39:51 PM	H2 valve closed
1/5/2011	12:39:51 PM	BCl3 valve closed
1/5/2011	12:39:51 PM	PH3 valve closed
1/5/2011	12:39:51 PM	SiCl4 pre valve closed
1/5/2011	12:39:51 PM	SiCl4 post valve closed
1/5/2011	12:39:51 PM	Bubbler valve closed
1/5/2011	12:39:51 PM	Main Vac valve opened
1/5/2011	12:39:51 PM	Bypass valve opened
1/5/2011	12:39:51 PM	Helium MFC set to  0.000000
1/5/2011	12:39:51 PM	H2 MFC set to  0.000000
1/5/2011	12:39:51 PM	BCl3 MFC set to  0.000000
1/5/2011	12:39:51 PM	PHl3 MFC set to  0.000000
1/5/2011	12:39:51 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:39:51 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:39:51 PM	Tube furnace set to 0
1/5/2011	12:40:51 PM	H2 valve closed
1/5/2011	12:40:51 PM	BCl3 valve closed
1/5/2011	12:40:51 PM	PH3 valve closed
1/5/2011	12:40:51 PM	SiCl4 pre valve closed
1/5/2011	12:40:51 PM	SiCl4 post valve closed
1/5/2011	12:40:51 PM	Bubbler valve closed
1/5/2011	12:40:51 PM	Helium valve opened
1/5/2011	12:40:51 PM	Main Vac valve opened
1/5/2011	12:40:51 PM	Bypass valve opened
1/5/2011	12:40:51 PM	Helium MFC set to  100.000000
1/5/2011	12:40:51 PM	H2 MFC set to  0.000000
1/5/2011	12:40:51 PM	BCl3 MFC set to  0.000000
1/5/2011	12:40:51 PM	PHl3 MFC set to  0.000000
1/5/2011	12:40:51 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:40:51 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:40:52 PM	Tube furnace set to 0
1/5/2011	12:41:52 PM	Helium valve closed
1/5/2011	12:41:52 PM	H2 valve closed
1/5/2011	12:41:52 PM	BCl3 valve closed
1/5/2011	12:41:52 PM	PH3 valve closed
1/5/2011	12:41:52 PM	SiCl4 pre valve closed
1/5/2011	12:41:52 PM	SiCl4 post valve closed
1/5/2011	12:41:52 PM	Bubbler valve closed
1/5/2011	12:41:52 PM	Main Vac valve opened
1/5/2011	12:41:52 PM	Bypass valve opened
1/5/2011	12:41:52 PM	Helium MFC set to  0.000000
1/5/2011	12:41:52 PM	H2 MFC set to  0.000000
1/5/2011	12:41:52 PM	BCl3 MFC set to  0.000000
1/5/2011	12:41:52 PM	PHl3 MFC set to  0.000000
1/5/2011	12:41:52 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:41:52 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:41:52 PM	Tube furnace set to 0
1/5/2011	12:42:52 PM	H2 valve closed
1/5/2011	12:42:52 PM	BCl3 valve closed
1/5/2011	12:42:52 PM	PH3 valve closed
1/5/2011	12:42:52 PM	SiCl4 pre valve closed
1/5/2011	12:42:52 PM	SiCl4 post valve closed
1/5/2011	12:42:52 PM	Bubbler valve closed
1/5/2011	12:42:52 PM	Helium valve opened
1/5/2011	12:42:52 PM	Main Vac valve opened
1/5/2011	12:42:52 PM	Bypass valve opened
1/5/2011	12:42:52 PM	Helium MFC set to  100.000000
1/5/2011	12:42:52 PM	H2 MFC set to  0.000000
1/5/2011	12:42:52 PM	BCl3 MFC set to  0.000000
1/5/2011	12:42:52 PM	PHl3 MFC set to  0.000000
1/5/2011	12:42:52 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:42:52 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:42:52 PM	Tube furnace set to 0
1/5/2011	12:43:52 PM	Helium valve closed
1/5/2011	12:43:52 PM	H2 valve closed
1/5/2011	12:43:52 PM	BCl3 valve closed
1/5/2011	12:43:52 PM	PH3 valve closed
1/5/2011	12:43:52 PM	SiCl4 pre valve closed
1/5/2011	12:43:52 PM	SiCl4 post valve closed
1/5/2011	12:43:52 PM	Bubbler valve closed
1/5/2011	12:43:52 PM	Main Vac valve opened
1/5/2011	12:43:52 PM	Bypass valve opened
1/5/2011	12:43:52 PM	Helium MFC set to  0.000000
1/5/2011	12:43:52 PM	H2 MFC set to  0.000000
1/5/2011	12:43:52 PM	BCl3 MFC set to  0.000000
1/5/2011	12:43:52 PM	PHl3 MFC set to  0.000000
1/5/2011	12:43:52 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:43:52 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:43:52 PM	Tube furnace set to 0
1/5/2011	12:44:52 PM	H2 valve closed
1/5/2011	12:44:52 PM	BCl3 valve closed
1/5/2011	12:44:52 PM	PH3 valve closed
1/5/2011	12:44:52 PM	SiCl4 pre valve closed
1/5/2011	12:44:52 PM	SiCl4 post valve closed
1/5/2011	12:44:52 PM	Bubbler valve closed
1/5/2011	12:44:52 PM	Helium valve opened
1/5/2011	12:44:52 PM	Main Vac valve opened
1/5/2011	12:44:52 PM	Bypass valve opened
1/5/2011	12:44:52 PM	Helium MFC set to  100.000000
1/5/2011	12:44:52 PM	H2 MFC set to  0.000000
1/5/2011	12:44:52 PM	BCl3 MFC set to  0.000000
1/5/2011	12:44:52 PM	PHl3 MFC set to  0.000000
1/5/2011	12:44:52 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:44:52 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:44:52 PM	Tube furnace set to 0
1/5/2011	12:45:52 PM	Helium valve closed
1/5/2011	12:45:52 PM	H2 valve closed
1/5/2011	12:45:52 PM	BCl3 valve closed
1/5/2011	12:45:52 PM	PH3 valve closed
1/5/2011	12:45:52 PM	SiCl4 pre valve closed
1/5/2011	12:45:52 PM	SiCl4 post valve closed
1/5/2011	12:45:52 PM	Bubbler valve closed
1/5/2011	12:45:52 PM	Main Vac valve opened
1/5/2011	12:45:52 PM	Bypass valve opened
1/5/2011	12:45:52 PM	Helium MFC set to  0.000000
1/5/2011	12:45:52 PM	H2 MFC set to  0.000000
1/5/2011	12:45:52 PM	BCl3 MFC set to  0.000000
1/5/2011	12:45:52 PM	PHl3 MFC set to  0.000000
1/5/2011	12:45:52 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:45:52 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:45:53 PM	Tube furnace set to 0
1/5/2011	12:46:53 PM	H2 valve closed
1/5/2011	12:46:53 PM	BCl3 valve closed
1/5/2011	12:46:53 PM	PH3 valve closed
1/5/2011	12:46:53 PM	SiCl4 pre valve closed
1/5/2011	12:46:53 PM	SiCl4 post valve closed
1/5/2011	12:46:53 PM	Bubbler valve closed
1/5/2011	12:46:53 PM	Helium valve opened
1/5/2011	12:46:53 PM	Main Vac valve opened
1/5/2011	12:46:53 PM	Bypass valve opened
1/5/2011	12:46:53 PM	Helium MFC set to  100.000000
1/5/2011	12:46:53 PM	H2 MFC set to  0.000000
1/5/2011	12:46:53 PM	BCl3 MFC set to  0.000000
1/5/2011	12:46:53 PM	PHl3 MFC set to  0.000000
1/5/2011	12:46:53 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:46:53 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:46:53 PM	Tube furnace set to 0
1/5/2011	12:47:53 PM	Helium valve closed
1/5/2011	12:47:53 PM	H2 valve closed
1/5/2011	12:47:53 PM	BCl3 valve closed
1/5/2011	12:47:53 PM	PH3 valve closed
1/5/2011	12:47:53 PM	SiCl4 pre valve closed
1/5/2011	12:47:53 PM	SiCl4 post valve closed
1/5/2011	12:47:53 PM	Bubbler valve closed
1/5/2011	12:47:53 PM	Main Vac valve opened
1/5/2011	12:47:53 PM	Bypass valve opened
1/5/2011	12:47:53 PM	Helium MFC set to  0.000000
1/5/2011	12:47:53 PM	H2 MFC set to  0.000000
1/5/2011	12:47:53 PM	BCl3 MFC set to  0.000000
1/5/2011	12:47:53 PM	PHl3 MFC set to  0.000000
1/5/2011	12:47:53 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:47:53 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:47:53 PM	Tube furnace set to 0
1/5/2011	12:47:54 PM	Run finished at 12:47 PM
1/5/2011	12:47:54 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/5/2011	12:57:45 PM	Recipe started at 12:57 PM
1/5/2011	12:57:45 PM	Helium valve closed
1/5/2011	12:57:45 PM	BCl3 valve closed
1/5/2011	12:57:45 PM	PH3 valve closed
1/5/2011	12:57:45 PM	SiCl4 pre valve closed
1/5/2011	12:57:45 PM	SiCl4 post valve closed
1/5/2011	12:57:45 PM	Main Vac valve closed
1/5/2011	12:57:45 PM	Bypass valve closed
1/5/2011	12:57:45 PM	Bubbler valve closed
1/5/2011	12:57:45 PM	H2 valve opened
1/5/2011	12:57:45 PM	Helium MFC set to  0.000000
1/5/2011	12:57:45 PM	H2 MFC set to  500.000000
1/5/2011	12:57:45 PM	BCl3 MFC set to  0.000000
1/5/2011	12:57:45 PM	PHl3 MFC set to  0.000000
1/5/2011	12:57:45 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:57:45 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:57:45 PM	Tube furnace set to 0
1/5/2011	12:59:07 PM	Helium valve closed
1/5/2011	12:59:07 PM	BCl3 valve closed
1/5/2011	12:59:07 PM	PH3 valve closed
1/5/2011	12:59:07 PM	SiCl4 pre valve closed
1/5/2011	12:59:07 PM	SiCl4 post valve closed
1/5/2011	12:59:07 PM	Main Vac valve closed
1/5/2011	12:59:07 PM	Bypass valve closed
1/5/2011	12:59:07 PM	H2 valve opened
1/5/2011	12:59:07 PM	Bubbler valve opened
1/5/2011	12:59:07 PM	Helium MFC set to  0.000000
1/5/2011	12:59:07 PM	H2 MFC set to  500.000000
1/5/2011	12:59:07 PM	BCl3 MFC set to  0.000000
1/5/2011	12:59:07 PM	PHl3 MFC set to  0.000000
1/5/2011	12:59:07 PM	SiCl4 MFC set to  0.000000
1/5/2011	12:59:07 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	12:59:07 PM	Tube furnace set to 1000
1/5/2011	1:19:07 PM	Helium valve closed
1/5/2011	1:19:07 PM	PH3 valve closed
1/5/2011	1:19:07 PM	Main Vac valve closed
1/5/2011	1:19:07 PM	Bypass valve closed
1/5/2011	1:19:07 PM	H2 valve opened
1/5/2011	1:19:07 PM	BCl3 valve opened
1/5/2011	1:19:07 PM	SiCl4 pre valve opened
1/5/2011	1:19:08 PM	SiCl4 post valve opened
1/5/2011	1:19:08 PM	Bubbler valve opened
1/5/2011	1:19:08 PM	Helium MFC set to  0.000000
1/5/2011	1:19:08 PM	H2 MFC set to  500.000000
1/5/2011	1:19:08 PM	BCl3 MFC set to  2.000000
1/5/2011	1:19:08 PM	PHl3 MFC set to  0.000000
1/5/2011	1:19:08 PM	SiCl4 MFC set to  50.000000
1/5/2011	1:19:08 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	1:19:08 PM	Tube furnace set to 1000
1/5/2011	1:34:08 PM	H2 valve closed
1/5/2011	1:34:08 PM	BCl3 valve closed
1/5/2011	1:34:08 PM	PH3 valve closed
1/5/2011	1:34:08 PM	SiCl4 pre valve closed
1/5/2011	1:34:08 PM	SiCl4 post valve closed
1/5/2011	1:34:08 PM	Main Vac valve closed
1/5/2011	1:34:08 PM	Bypass valve closed
1/5/2011	1:34:08 PM	Helium valve opened
1/5/2011	1:34:08 PM	Bubbler valve opened
1/5/2011	1:34:08 PM	Helium MFC set to  500.000000
1/5/2011	1:34:08 PM	H2 MFC set to  0.000000
1/5/2011	1:34:08 PM	BCl3 MFC set to  0.000000
1/5/2011	1:34:08 PM	PHl3 MFC set to  0.000000
1/5/2011	1:34:08 PM	SiCl4 MFC set to  0.000000
1/5/2011	1:34:08 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	1:34:08 PM	Tube furnace set to 0
1/5/2011	1:54:08 PM	Helium valve closed
1/5/2011	1:54:08 PM	H2 valve closed
1/5/2011	1:54:08 PM	BCl3 valve closed
1/5/2011	1:54:08 PM	PH3 valve closed
1/5/2011	1:54:08 PM	SiCl4 pre valve closed
1/5/2011	1:54:08 PM	SiCl4 post valve closed
1/5/2011	1:54:08 PM	Main Vac valve closed
1/5/2011	1:54:08 PM	Bypass valve closed
1/5/2011	1:54:08 PM	Bubbler valve closed
1/5/2011	1:54:08 PM	Helium MFC set to  0.000000
1/5/2011	1:54:08 PM	H2 MFC set to  0.000000
1/5/2011	1:54:08 PM	BCl3 MFC set to  0.000000
1/5/2011	1:54:08 PM	PHl3 MFC set to  0.000000
1/5/2011	1:54:08 PM	SiCl4 MFC set to  0.000000
1/5/2011	1:54:08 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	1:54:08 PM	Tube furnace set to 0
1/5/2011	1:54:08 PM	Run finished at 1:54 PM
1/5/2011	2:15:18 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/5/2011	2:15:18 PM	Recipe started at 2:15 PM
1/5/2011	2:15:18 PM	H2 valve closed
1/5/2011	2:15:18 PM	BCl3 valve closed
1/5/2011	2:15:18 PM	PH3 valve closed
1/5/2011	2:15:18 PM	SiCl4 pre valve closed
1/5/2011	2:15:18 PM	SiCl4 post valve closed
1/5/2011	2:15:18 PM	Main Vac valve closed
1/5/2011	2:15:18 PM	Bypass valve closed
1/5/2011	2:15:18 PM	Bubbler valve closed
1/5/2011	2:15:18 PM	Helium valve opened
1/5/2011	2:15:18 PM	Helium MFC set to  500.000000
1/5/2011	2:15:18 PM	H2 MFC set to  0.000000
1/5/2011	2:15:18 PM	BCl3 MFC set to  0.000000
1/5/2011	2:15:18 PM	PHl3 MFC set to  0.000000
1/5/2011	2:15:18 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:15:18 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:15:19 PM	Tube furnace set to 0
1/5/2011	2:15:23 PM	Helium valve closed
1/5/2011	2:15:23 PM	H2 valve closed
1/5/2011	2:15:23 PM	BCl3 valve closed
1/5/2011	2:15:23 PM	PH3 valve closed
1/5/2011	2:15:23 PM	SiCl4 pre valve closed
1/5/2011	2:15:23 PM	SiCl4 post valve closed
1/5/2011	2:15:23 PM	Main Vac valve closed
1/5/2011	2:15:23 PM	Bypass valve closed
1/5/2011	2:15:23 PM	Bubbler valve closed
1/5/2011	2:15:23 PM	Helium MFC set to  0.000000
1/5/2011	2:15:23 PM	H2 MFC set to  0.000000
1/5/2011	2:15:23 PM	BCl3 MFC set to  0.000000
1/5/2011	2:15:23 PM	PHl3 MFC set to  0.000000
1/5/2011	2:15:23 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:15:23 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:15:23 PM	Tube furnace set to 0
1/5/2011	2:15:23 PM	Run finished at 2:15 PM
1/5/2011	2:15:23 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\vent.xml
1/5/2011	2:20:35 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/5/2011	2:20:35 PM	Recipe started at 2:20 PM
1/5/2011	2:20:35 PM	Helium valve closed
1/5/2011	2:20:35 PM	H2 valve closed
1/5/2011	2:20:35 PM	BCl3 valve closed
1/5/2011	2:20:35 PM	PH3 valve closed
1/5/2011	2:20:35 PM	SiCl4 pre valve closed
1/5/2011	2:20:35 PM	SiCl4 post valve closed
1/5/2011	2:20:35 PM	Main Vac valve closed
1/5/2011	2:20:35 PM	Bubbler valve closed
1/5/2011	2:20:35 PM	Bypass valve opened
1/5/2011	2:20:35 PM	Helium MFC set to  0.000000
1/5/2011	2:20:35 PM	H2 MFC set to  0.000000
1/5/2011	2:20:35 PM	BCl3 MFC set to  0.000000
1/5/2011	2:20:35 PM	PHl3 MFC set to  0.000000
1/5/2011	2:20:35 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:20:35 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:20:35 PM	Tube furnace set to 0
1/5/2011	2:21:37 PM	Helium valve closed
1/5/2011	2:21:37 PM	H2 valve closed
1/5/2011	2:21:37 PM	BCl3 valve closed
1/5/2011	2:21:37 PM	PH3 valve closed
1/5/2011	2:21:37 PM	SiCl4 pre valve closed
1/5/2011	2:21:37 PM	SiCl4 post valve closed
1/5/2011	2:21:37 PM	Bubbler valve closed
1/5/2011	2:21:37 PM	Main Vac valve opened
1/5/2011	2:21:37 PM	Bypass valve opened
1/5/2011	2:21:37 PM	Helium MFC set to  0.000000
1/5/2011	2:21:37 PM	H2 MFC set to  0.000000
1/5/2011	2:21:37 PM	BCl3 MFC set to  0.000000
1/5/2011	2:21:37 PM	PHl3 MFC set to  0.000000
1/5/2011	2:21:37 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:21:37 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:21:37 PM	Tube furnace set to 0
1/5/2011	2:21:38 PM	Run finished at 2:21 PM
1/5/2011	2:21:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/5/2011	2:22:26 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/5/2011	2:22:38 PM	Recipe started at 2:22 PM
1/5/2011	2:22:38 PM	Helium valve closed
1/5/2011	2:22:38 PM	H2 valve closed
1/5/2011	2:22:38 PM	BCl3 valve closed
1/5/2011	2:22:38 PM	PH3 valve closed
1/5/2011	2:22:38 PM	SiCl4 pre valve closed
1/5/2011	2:22:38 PM	SiCl4 post valve closed
1/5/2011	2:22:38 PM	Main Vac valve closed
1/5/2011	2:22:38 PM	Bubbler valve closed
1/5/2011	2:22:38 PM	Bypass valve opened
1/5/2011	2:22:38 PM	Helium MFC set to  0.000000
1/5/2011	2:22:38 PM	H2 MFC set to  0.000000
1/5/2011	2:22:38 PM	BCl3 MFC set to  0.000000
1/5/2011	2:22:38 PM	PHl3 MFC set to  0.000000
1/5/2011	2:22:38 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:22:38 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:22:39 PM	Tube furnace set to 0
1/5/2011	2:22:39 PM	Helium valve closed
1/5/2011	2:22:39 PM	H2 valve closed
1/5/2011	2:22:39 PM	BCl3 valve closed
1/5/2011	2:22:39 PM	PH3 valve closed
1/5/2011	2:22:39 PM	SiCl4 pre valve closed
1/5/2011	2:22:39 PM	SiCl4 post valve closed
1/5/2011	2:22:39 PM	Bubbler valve closed
1/5/2011	2:22:39 PM	Main Vac valve opened
1/5/2011	2:22:39 PM	Bypass valve opened
1/5/2011	2:22:39 PM	Helium MFC set to  0.000000
1/5/2011	2:22:39 PM	H2 MFC set to  0.000000
1/5/2011	2:22:39 PM	BCl3 MFC set to  0.000000
1/5/2011	2:22:39 PM	PHl3 MFC set to  0.000000
1/5/2011	2:22:39 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:22:39 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:22:39 PM	Tube furnace set to 0
1/5/2011	2:23:39 PM	H2 valve closed
1/5/2011	2:23:39 PM	BCl3 valve closed
1/5/2011	2:23:39 PM	PH3 valve closed
1/5/2011	2:23:39 PM	SiCl4 pre valve closed
1/5/2011	2:23:39 PM	SiCl4 post valve closed
1/5/2011	2:23:39 PM	Bubbler valve closed
1/5/2011	2:23:39 PM	Helium valve opened
1/5/2011	2:23:39 PM	Main Vac valve opened
1/5/2011	2:23:39 PM	Bypass valve opened
1/5/2011	2:23:39 PM	Helium MFC set to  100.000000
1/5/2011	2:23:39 PM	H2 MFC set to  0.000000
1/5/2011	2:23:39 PM	BCl3 MFC set to  0.000000
1/5/2011	2:23:39 PM	PHl3 MFC set to  0.000000
1/5/2011	2:23:39 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:23:39 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:23:39 PM	Tube furnace set to 0
1/5/2011	2:24:39 PM	Helium valve closed
1/5/2011	2:24:39 PM	H2 valve closed
1/5/2011	2:24:39 PM	BCl3 valve closed
1/5/2011	2:24:39 PM	PH3 valve closed
1/5/2011	2:24:39 PM	SiCl4 pre valve closed
1/5/2011	2:24:39 PM	SiCl4 post valve closed
1/5/2011	2:24:39 PM	Bubbler valve closed
1/5/2011	2:24:39 PM	Main Vac valve opened
1/5/2011	2:24:39 PM	Bypass valve opened
1/5/2011	2:24:39 PM	Helium MFC set to  0.000000
1/5/2011	2:24:39 PM	H2 MFC set to  0.000000
1/5/2011	2:24:39 PM	BCl3 MFC set to  0.000000
1/5/2011	2:24:39 PM	PHl3 MFC set to  0.000000
1/5/2011	2:24:39 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:24:39 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:24:39 PM	Tube furnace set to 0
1/5/2011	2:25:39 PM	H2 valve closed
1/5/2011	2:25:39 PM	BCl3 valve closed
1/5/2011	2:25:39 PM	PH3 valve closed
1/5/2011	2:25:39 PM	SiCl4 pre valve closed
1/5/2011	2:25:39 PM	SiCl4 post valve closed
1/5/2011	2:25:39 PM	Bubbler valve closed
1/5/2011	2:25:39 PM	Helium valve opened
1/5/2011	2:25:39 PM	Main Vac valve opened
1/5/2011	2:25:39 PM	Bypass valve opened
1/5/2011	2:25:39 PM	Helium MFC set to  100.000000
1/5/2011	2:25:39 PM	H2 MFC set to  0.000000
1/5/2011	2:25:39 PM	BCl3 MFC set to  0.000000
1/5/2011	2:25:39 PM	PHl3 MFC set to  0.000000
1/5/2011	2:25:39 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:25:39 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:25:40 PM	Tube furnace set to 0
1/5/2011	2:26:40 PM	Helium valve closed
1/5/2011	2:26:40 PM	H2 valve closed
1/5/2011	2:26:40 PM	BCl3 valve closed
1/5/2011	2:26:40 PM	PH3 valve closed
1/5/2011	2:26:40 PM	SiCl4 pre valve closed
1/5/2011	2:26:40 PM	SiCl4 post valve closed
1/5/2011	2:26:40 PM	Bubbler valve closed
1/5/2011	2:26:40 PM	Main Vac valve opened
1/5/2011	2:26:40 PM	Bypass valve opened
1/5/2011	2:26:40 PM	Helium MFC set to  0.000000
1/5/2011	2:26:40 PM	H2 MFC set to  0.000000
1/5/2011	2:26:40 PM	BCl3 MFC set to  0.000000
1/5/2011	2:26:40 PM	PHl3 MFC set to  0.000000
1/5/2011	2:26:40 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:26:40 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:26:40 PM	Tube furnace set to 0
1/5/2011	2:27:40 PM	H2 valve closed
1/5/2011	2:27:40 PM	BCl3 valve closed
1/5/2011	2:27:40 PM	PH3 valve closed
1/5/2011	2:27:40 PM	SiCl4 pre valve closed
1/5/2011	2:27:40 PM	SiCl4 post valve closed
1/5/2011	2:27:40 PM	Bubbler valve closed
1/5/2011	2:27:40 PM	Helium valve opened
1/5/2011	2:27:40 PM	Main Vac valve opened
1/5/2011	2:27:40 PM	Bypass valve opened
1/5/2011	2:27:40 PM	Helium MFC set to  100.000000
1/5/2011	2:27:40 PM	H2 MFC set to  0.000000
1/5/2011	2:27:40 PM	BCl3 MFC set to  0.000000
1/5/2011	2:27:40 PM	PHl3 MFC set to  0.000000
1/5/2011	2:27:40 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:27:40 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:27:40 PM	Tube furnace set to 0
1/5/2011	2:28:40 PM	Helium valve closed
1/5/2011	2:28:40 PM	H2 valve closed
1/5/2011	2:28:40 PM	BCl3 valve closed
1/5/2011	2:28:40 PM	PH3 valve closed
1/5/2011	2:28:40 PM	SiCl4 pre valve closed
1/5/2011	2:28:40 PM	SiCl4 post valve closed
1/5/2011	2:28:40 PM	Bubbler valve closed
1/5/2011	2:28:40 PM	Main Vac valve opened
1/5/2011	2:28:40 PM	Bypass valve opened
1/5/2011	2:28:40 PM	Helium MFC set to  0.000000
1/5/2011	2:28:40 PM	H2 MFC set to  0.000000
1/5/2011	2:28:40 PM	BCl3 MFC set to  0.000000
1/5/2011	2:28:40 PM	PHl3 MFC set to  0.000000
1/5/2011	2:28:40 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:28:40 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:28:40 PM	Tube furnace set to 0
1/5/2011	2:29:40 PM	H2 valve closed
1/5/2011	2:29:40 PM	BCl3 valve closed
1/5/2011	2:29:40 PM	PH3 valve closed
1/5/2011	2:29:40 PM	SiCl4 pre valve closed
1/5/2011	2:29:40 PM	SiCl4 post valve closed
1/5/2011	2:29:40 PM	Bubbler valve closed
1/5/2011	2:29:40 PM	Helium valve opened
1/5/2011	2:29:40 PM	Main Vac valve opened
1/5/2011	2:29:40 PM	Bypass valve opened
1/5/2011	2:29:40 PM	Helium MFC set to  100.000000
1/5/2011	2:29:40 PM	H2 MFC set to  0.000000
1/5/2011	2:29:40 PM	BCl3 MFC set to  0.000000
1/5/2011	2:29:40 PM	PHl3 MFC set to  0.000000
1/5/2011	2:29:40 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:29:40 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:29:40 PM	Tube furnace set to 0
1/5/2011	2:30:40 PM	Helium valve closed
1/5/2011	2:30:40 PM	H2 valve closed
1/5/2011	2:30:40 PM	BCl3 valve closed
1/5/2011	2:30:40 PM	PH3 valve closed
1/5/2011	2:30:40 PM	SiCl4 pre valve closed
1/5/2011	2:30:40 PM	SiCl4 post valve closed
1/5/2011	2:30:40 PM	Bubbler valve closed
1/5/2011	2:30:40 PM	Main Vac valve opened
1/5/2011	2:30:40 PM	Bypass valve opened
1/5/2011	2:30:40 PM	Helium MFC set to  0.000000
1/5/2011	2:30:40 PM	H2 MFC set to  0.000000
1/5/2011	2:30:40 PM	BCl3 MFC set to  0.000000
1/5/2011	2:30:40 PM	PHl3 MFC set to  0.000000
1/5/2011	2:30:40 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:30:40 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:30:41 PM	Tube furnace set to 0
1/5/2011	2:31:41 PM	H2 valve closed
1/5/2011	2:31:41 PM	BCl3 valve closed
1/5/2011	2:31:41 PM	PH3 valve closed
1/5/2011	2:31:41 PM	SiCl4 pre valve closed
1/5/2011	2:31:41 PM	SiCl4 post valve closed
1/5/2011	2:31:41 PM	Bubbler valve closed
1/5/2011	2:31:41 PM	Helium valve opened
1/5/2011	2:31:41 PM	Main Vac valve opened
1/5/2011	2:31:41 PM	Bypass valve opened
1/5/2011	2:31:41 PM	Helium MFC set to  100.000000
1/5/2011	2:31:41 PM	H2 MFC set to  0.000000
1/5/2011	2:31:41 PM	BCl3 MFC set to  0.000000
1/5/2011	2:31:41 PM	PHl3 MFC set to  0.000000
1/5/2011	2:31:41 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:31:41 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:31:41 PM	Tube furnace set to 0
1/5/2011	2:32:41 PM	Helium valve closed
1/5/2011	2:32:41 PM	H2 valve closed
1/5/2011	2:32:41 PM	BCl3 valve closed
1/5/2011	2:32:41 PM	PH3 valve closed
1/5/2011	2:32:41 PM	SiCl4 pre valve closed
1/5/2011	2:32:41 PM	SiCl4 post valve closed
1/5/2011	2:32:41 PM	Bubbler valve closed
1/5/2011	2:32:41 PM	Main Vac valve opened
1/5/2011	2:32:41 PM	Bypass valve opened
1/5/2011	2:32:41 PM	Helium MFC set to  0.000000
1/5/2011	2:32:41 PM	H2 MFC set to  0.000000
1/5/2011	2:32:41 PM	BCl3 MFC set to  0.000000
1/5/2011	2:32:41 PM	PHl3 MFC set to  0.000000
1/5/2011	2:32:41 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:32:41 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:32:41 PM	Tube furnace set to 0
1/5/2011	2:33:41 PM	H2 valve closed
1/5/2011	2:33:41 PM	BCl3 valve closed
1/5/2011	2:33:41 PM	PH3 valve closed
1/5/2011	2:33:41 PM	SiCl4 pre valve closed
1/5/2011	2:33:41 PM	SiCl4 post valve closed
1/5/2011	2:33:41 PM	Bubbler valve closed
1/5/2011	2:33:41 PM	Helium valve opened
1/5/2011	2:33:41 PM	Main Vac valve opened
1/5/2011	2:33:41 PM	Bypass valve opened
1/5/2011	2:33:41 PM	Helium MFC set to  100.000000
1/5/2011	2:33:41 PM	H2 MFC set to  0.000000
1/5/2011	2:33:41 PM	BCl3 MFC set to  0.000000
1/5/2011	2:33:41 PM	PHl3 MFC set to  0.000000
1/5/2011	2:33:41 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:33:41 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:33:41 PM	Tube furnace set to 0
1/5/2011	2:34:41 PM	Helium valve closed
1/5/2011	2:34:41 PM	H2 valve closed
1/5/2011	2:34:41 PM	BCl3 valve closed
1/5/2011	2:34:41 PM	PH3 valve closed
1/5/2011	2:34:41 PM	SiCl4 pre valve closed
1/5/2011	2:34:41 PM	SiCl4 post valve closed
1/5/2011	2:34:41 PM	Bubbler valve closed
1/5/2011	2:34:41 PM	Main Vac valve opened
1/5/2011	2:34:41 PM	Bypass valve opened
1/5/2011	2:34:41 PM	Helium MFC set to  0.000000
1/5/2011	2:34:41 PM	H2 MFC set to  0.000000
1/5/2011	2:34:41 PM	BCl3 MFC set to  0.000000
1/5/2011	2:34:41 PM	PHl3 MFC set to  0.000000
1/5/2011	2:34:41 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:34:41 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:34:41 PM	Tube furnace set to 0
1/5/2011	2:35:41 PM	H2 valve closed
1/5/2011	2:35:41 PM	BCl3 valve closed
1/5/2011	2:35:41 PM	PH3 valve closed
1/5/2011	2:35:41 PM	SiCl4 pre valve closed
1/5/2011	2:35:41 PM	SiCl4 post valve closed
1/5/2011	2:35:41 PM	Bubbler valve closed
1/5/2011	2:35:41 PM	Helium valve opened
1/5/2011	2:35:41 PM	Main Vac valve opened
1/5/2011	2:35:41 PM	Bypass valve opened
1/5/2011	2:35:41 PM	Helium MFC set to  100.000000
1/5/2011	2:35:41 PM	H2 MFC set to  0.000000
1/5/2011	2:35:41 PM	BCl3 MFC set to  0.000000
1/5/2011	2:35:41 PM	PHl3 MFC set to  0.000000
1/5/2011	2:35:41 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:35:41 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:35:42 PM	Tube furnace set to 0
1/5/2011	2:36:42 PM	Helium valve closed
1/5/2011	2:36:42 PM	H2 valve closed
1/5/2011	2:36:42 PM	BCl3 valve closed
1/5/2011	2:36:42 PM	PH3 valve closed
1/5/2011	2:36:42 PM	SiCl4 pre valve closed
1/5/2011	2:36:42 PM	SiCl4 post valve closed
1/5/2011	2:36:42 PM	Bubbler valve closed
1/5/2011	2:36:42 PM	Main Vac valve opened
1/5/2011	2:36:42 PM	Bypass valve opened
1/5/2011	2:36:42 PM	Helium MFC set to  0.000000
1/5/2011	2:36:42 PM	H2 MFC set to  0.000000
1/5/2011	2:36:42 PM	BCl3 MFC set to  0.000000
1/5/2011	2:36:42 PM	PHl3 MFC set to  0.000000
1/5/2011	2:36:42 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:36:42 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:36:42 PM	Tube furnace set to 0
1/5/2011	2:37:42 PM	H2 valve closed
1/5/2011	2:37:42 PM	BCl3 valve closed
1/5/2011	2:37:42 PM	PH3 valve closed
1/5/2011	2:37:42 PM	SiCl4 pre valve closed
1/5/2011	2:37:42 PM	SiCl4 post valve closed
1/5/2011	2:37:42 PM	Bubbler valve closed
1/5/2011	2:37:42 PM	Helium valve opened
1/5/2011	2:37:42 PM	Main Vac valve opened
1/5/2011	2:37:42 PM	Bypass valve opened
1/5/2011	2:37:42 PM	Helium MFC set to  100.000000
1/5/2011	2:37:42 PM	H2 MFC set to  0.000000
1/5/2011	2:37:42 PM	BCl3 MFC set to  0.000000
1/5/2011	2:37:42 PM	PHl3 MFC set to  0.000000
1/5/2011	2:37:42 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:37:42 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:37:42 PM	Tube furnace set to 0
1/5/2011	2:38:42 PM	Helium valve closed
1/5/2011	2:38:42 PM	H2 valve closed
1/5/2011	2:38:42 PM	BCl3 valve closed
1/5/2011	2:38:42 PM	PH3 valve closed
1/5/2011	2:38:42 PM	SiCl4 pre valve closed
1/5/2011	2:38:42 PM	SiCl4 post valve closed
1/5/2011	2:38:42 PM	Bubbler valve closed
1/5/2011	2:38:42 PM	Main Vac valve opened
1/5/2011	2:38:42 PM	Bypass valve opened
1/5/2011	2:38:42 PM	Helium MFC set to  0.000000
1/5/2011	2:38:42 PM	H2 MFC set to  0.000000
1/5/2011	2:38:42 PM	BCl3 MFC set to  0.000000
1/5/2011	2:38:42 PM	PHl3 MFC set to  0.000000
1/5/2011	2:38:42 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:38:42 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:38:42 PM	Tube furnace set to 0
1/5/2011	2:39:42 PM	H2 valve closed
1/5/2011	2:39:42 PM	BCl3 valve closed
1/5/2011	2:39:42 PM	PH3 valve closed
1/5/2011	2:39:42 PM	SiCl4 pre valve closed
1/5/2011	2:39:42 PM	SiCl4 post valve closed
1/5/2011	2:39:42 PM	Bubbler valve closed
1/5/2011	2:39:42 PM	Helium valve opened
1/5/2011	2:39:42 PM	Main Vac valve opened
1/5/2011	2:39:42 PM	Bypass valve opened
1/5/2011	2:39:42 PM	Helium MFC set to  100.000000
1/5/2011	2:39:42 PM	H2 MFC set to  0.000000
1/5/2011	2:39:42 PM	BCl3 MFC set to  0.000000
1/5/2011	2:39:42 PM	PHl3 MFC set to  0.000000
1/5/2011	2:39:42 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:39:42 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:39:43 PM	Tube furnace set to 0
1/5/2011	2:40:43 PM	Helium valve closed
1/5/2011	2:40:43 PM	H2 valve closed
1/5/2011	2:40:43 PM	BCl3 valve closed
1/5/2011	2:40:43 PM	PH3 valve closed
1/5/2011	2:40:43 PM	SiCl4 pre valve closed
1/5/2011	2:40:43 PM	SiCl4 post valve closed
1/5/2011	2:40:43 PM	Bubbler valve closed
1/5/2011	2:40:43 PM	Main Vac valve opened
1/5/2011	2:40:43 PM	Bypass valve opened
1/5/2011	2:40:43 PM	Helium MFC set to  0.000000
1/5/2011	2:40:43 PM	H2 MFC set to  0.000000
1/5/2011	2:40:43 PM	BCl3 MFC set to  0.000000
1/5/2011	2:40:43 PM	PHl3 MFC set to  0.000000
1/5/2011	2:40:43 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:40:43 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:40:43 PM	Tube furnace set to 0
1/5/2011	2:41:43 PM	H2 valve closed
1/5/2011	2:41:43 PM	BCl3 valve closed
1/5/2011	2:41:43 PM	PH3 valve closed
1/5/2011	2:41:43 PM	SiCl4 pre valve closed
1/5/2011	2:41:43 PM	SiCl4 post valve closed
1/5/2011	2:41:43 PM	Bubbler valve closed
1/5/2011	2:41:43 PM	Helium valve opened
1/5/2011	2:41:43 PM	Main Vac valve opened
1/5/2011	2:41:43 PM	Bypass valve opened
1/5/2011	2:41:43 PM	Helium MFC set to  100.000000
1/5/2011	2:41:43 PM	H2 MFC set to  0.000000
1/5/2011	2:41:43 PM	BCl3 MFC set to  0.000000
1/5/2011	2:41:43 PM	PHl3 MFC set to  0.000000
1/5/2011	2:41:43 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:41:43 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:41:43 PM	Tube furnace set to 0
1/5/2011	2:42:43 PM	Helium valve closed
1/5/2011	2:42:43 PM	H2 valve closed
1/5/2011	2:42:43 PM	BCl3 valve closed
1/5/2011	2:42:43 PM	PH3 valve closed
1/5/2011	2:42:43 PM	SiCl4 pre valve closed
1/5/2011	2:42:43 PM	SiCl4 post valve closed
1/5/2011	2:42:43 PM	Bubbler valve closed
1/5/2011	2:42:43 PM	Main Vac valve opened
1/5/2011	2:42:43 PM	Bypass valve opened
1/5/2011	2:42:43 PM	Helium MFC set to  0.000000
1/5/2011	2:42:43 PM	H2 MFC set to  0.000000
1/5/2011	2:42:43 PM	BCl3 MFC set to  0.000000
1/5/2011	2:42:43 PM	PHl3 MFC set to  0.000000
1/5/2011	2:42:43 PM	SiCl4 MFC set to  0.000000
1/5/2011	2:42:43 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	2:42:43 PM	Tube furnace set to 0
1/5/2011	2:42:44 PM	Run finished at 2:42 PM
1/5/2011	2:42:44 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/5/2011	3:10:09 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/5/2011	3:10:22 PM	Recipe started at 3:10 PM
1/5/2011	3:10:22 PM	Helium valve closed
1/5/2011	3:10:22 PM	H2 valve closed
1/5/2011	3:10:22 PM	BCl3 valve closed
1/5/2011	3:10:22 PM	PH3 valve closed
1/5/2011	3:10:22 PM	SiCl4 pre valve closed
1/5/2011	3:10:22 PM	SiCl4 post valve closed
1/5/2011	3:10:22 PM	Main Vac valve closed
1/5/2011	3:10:22 PM	Bubbler valve closed
1/5/2011	3:10:22 PM	Bypass valve opened
1/5/2011	3:10:22 PM	Helium MFC set to  0.000000
1/5/2011	3:10:22 PM	H2 MFC set to  0.000000
1/5/2011	3:10:22 PM	BCl3 MFC set to  0.000000
1/5/2011	3:10:22 PM	PHl3 MFC set to  0.000000
1/5/2011	3:10:22 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:10:22 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:10:22 PM	Tube furnace set to 0
1/5/2011	3:10:22 PM	Helium valve closed
1/5/2011	3:10:22 PM	H2 valve closed
1/5/2011	3:10:22 PM	BCl3 valve closed
1/5/2011	3:10:22 PM	PH3 valve closed
1/5/2011	3:10:22 PM	SiCl4 pre valve closed
1/5/2011	3:10:22 PM	SiCl4 post valve closed
1/5/2011	3:10:22 PM	Bubbler valve closed
1/5/2011	3:10:22 PM	Main Vac valve opened
1/5/2011	3:10:22 PM	Bypass valve opened
1/5/2011	3:10:22 PM	Helium MFC set to  0.000000
1/5/2011	3:10:22 PM	H2 MFC set to  0.000000
1/5/2011	3:10:22 PM	BCl3 MFC set to  0.000000
1/5/2011	3:10:22 PM	PHl3 MFC set to  0.000000
1/5/2011	3:10:22 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:10:22 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:10:22 PM	Tube furnace set to 0
1/5/2011	3:11:22 PM	H2 valve closed
1/5/2011	3:11:22 PM	BCl3 valve closed
1/5/2011	3:11:23 PM	PH3 valve closed
1/5/2011	3:11:23 PM	SiCl4 pre valve closed
1/5/2011	3:11:23 PM	SiCl4 post valve closed
1/5/2011	3:11:23 PM	Bubbler valve closed
1/5/2011	3:11:23 PM	Helium valve opened
1/5/2011	3:11:23 PM	Main Vac valve opened
1/5/2011	3:11:23 PM	Bypass valve opened
1/5/2011	3:11:23 PM	Helium MFC set to  100.000000
1/5/2011	3:11:23 PM	H2 MFC set to  0.000000
1/5/2011	3:11:23 PM	BCl3 MFC set to  0.000000
1/5/2011	3:11:23 PM	PHl3 MFC set to  0.000000
1/5/2011	3:11:23 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:11:23 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:11:23 PM	Tube furnace set to 0
1/5/2011	3:12:23 PM	Helium valve closed
1/5/2011	3:12:23 PM	H2 valve closed
1/5/2011	3:12:23 PM	BCl3 valve closed
1/5/2011	3:12:23 PM	PH3 valve closed
1/5/2011	3:12:23 PM	SiCl4 pre valve closed
1/5/2011	3:12:23 PM	SiCl4 post valve closed
1/5/2011	3:12:23 PM	Bubbler valve closed
1/5/2011	3:12:23 PM	Main Vac valve opened
1/5/2011	3:12:23 PM	Bypass valve opened
1/5/2011	3:12:23 PM	Helium MFC set to  0.000000
1/5/2011	3:12:23 PM	H2 MFC set to  0.000000
1/5/2011	3:12:23 PM	BCl3 MFC set to  0.000000
1/5/2011	3:12:23 PM	PHl3 MFC set to  0.000000
1/5/2011	3:12:23 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:12:23 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:12:23 PM	Tube furnace set to 0
1/5/2011	3:13:23 PM	H2 valve closed
1/5/2011	3:13:23 PM	BCl3 valve closed
1/5/2011	3:13:23 PM	PH3 valve closed
1/5/2011	3:13:23 PM	SiCl4 pre valve closed
1/5/2011	3:13:23 PM	SiCl4 post valve closed
1/5/2011	3:13:23 PM	Bubbler valve closed
1/5/2011	3:13:23 PM	Helium valve opened
1/5/2011	3:13:23 PM	Main Vac valve opened
1/5/2011	3:13:23 PM	Bypass valve opened
1/5/2011	3:13:23 PM	Helium MFC set to  100.000000
1/5/2011	3:13:23 PM	H2 MFC set to  0.000000
1/5/2011	3:13:23 PM	BCl3 MFC set to  0.000000
1/5/2011	3:13:23 PM	PHl3 MFC set to  0.000000
1/5/2011	3:13:23 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:13:23 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:13:23 PM	Tube furnace set to 0
1/5/2011	3:14:23 PM	Helium valve closed
1/5/2011	3:14:23 PM	H2 valve closed
1/5/2011	3:14:23 PM	BCl3 valve closed
1/5/2011	3:14:23 PM	PH3 valve closed
1/5/2011	3:14:23 PM	SiCl4 pre valve closed
1/5/2011	3:14:23 PM	SiCl4 post valve closed
1/5/2011	3:14:23 PM	Bubbler valve closed
1/5/2011	3:14:23 PM	Main Vac valve opened
1/5/2011	3:14:23 PM	Bypass valve opened
1/5/2011	3:14:23 PM	Helium MFC set to  0.000000
1/5/2011	3:14:23 PM	H2 MFC set to  0.000000
1/5/2011	3:14:23 PM	BCl3 MFC set to  0.000000
1/5/2011	3:14:23 PM	PHl3 MFC set to  0.000000
1/5/2011	3:14:23 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:14:23 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:14:23 PM	Tube furnace set to 0
1/5/2011	3:15:23 PM	H2 valve closed
1/5/2011	3:15:23 PM	BCl3 valve closed
1/5/2011	3:15:23 PM	PH3 valve closed
1/5/2011	3:15:23 PM	SiCl4 pre valve closed
1/5/2011	3:15:23 PM	SiCl4 post valve closed
1/5/2011	3:15:23 PM	Bubbler valve closed
1/5/2011	3:15:23 PM	Helium valve opened
1/5/2011	3:15:23 PM	Main Vac valve opened
1/5/2011	3:15:23 PM	Bypass valve opened
1/5/2011	3:15:23 PM	Helium MFC set to  100.000000
1/5/2011	3:15:23 PM	H2 MFC set to  0.000000
1/5/2011	3:15:23 PM	BCl3 MFC set to  0.000000
1/5/2011	3:15:23 PM	PHl3 MFC set to  0.000000
1/5/2011	3:15:23 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:15:23 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:15:23 PM	Tube furnace set to 0
1/5/2011	3:16:24 PM	Helium valve closed
1/5/2011	3:16:24 PM	H2 valve closed
1/5/2011	3:16:24 PM	BCl3 valve closed
1/5/2011	3:16:24 PM	PH3 valve closed
1/5/2011	3:16:24 PM	SiCl4 pre valve closed
1/5/2011	3:16:24 PM	SiCl4 post valve closed
1/5/2011	3:16:24 PM	Bubbler valve closed
1/5/2011	3:16:24 PM	Main Vac valve opened
1/5/2011	3:16:24 PM	Bypass valve opened
1/5/2011	3:16:24 PM	Helium MFC set to  0.000000
1/5/2011	3:16:24 PM	H2 MFC set to  0.000000
1/5/2011	3:16:24 PM	BCl3 MFC set to  0.000000
1/5/2011	3:16:24 PM	PHl3 MFC set to  0.000000
1/5/2011	3:16:24 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:16:24 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:16:24 PM	Tube furnace set to 0
1/5/2011	3:17:24 PM	H2 valve closed
1/5/2011	3:17:24 PM	BCl3 valve closed
1/5/2011	3:17:24 PM	PH3 valve closed
1/5/2011	3:17:24 PM	SiCl4 pre valve closed
1/5/2011	3:17:24 PM	SiCl4 post valve closed
1/5/2011	3:17:24 PM	Bubbler valve closed
1/5/2011	3:17:24 PM	Helium valve opened
1/5/2011	3:17:24 PM	Main Vac valve opened
1/5/2011	3:17:24 PM	Bypass valve opened
1/5/2011	3:17:24 PM	Helium MFC set to  100.000000
1/5/2011	3:17:24 PM	H2 MFC set to  0.000000
1/5/2011	3:17:24 PM	BCl3 MFC set to  0.000000
1/5/2011	3:17:24 PM	PHl3 MFC set to  0.000000
1/5/2011	3:17:24 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:17:24 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:17:24 PM	Tube furnace set to 0
1/5/2011	3:18:24 PM	Helium valve closed
1/5/2011	3:18:24 PM	H2 valve closed
1/5/2011	3:18:24 PM	BCl3 valve closed
1/5/2011	3:18:24 PM	PH3 valve closed
1/5/2011	3:18:24 PM	SiCl4 pre valve closed
1/5/2011	3:18:24 PM	SiCl4 post valve closed
1/5/2011	3:18:24 PM	Bubbler valve closed
1/5/2011	3:18:24 PM	Main Vac valve opened
1/5/2011	3:18:24 PM	Bypass valve opened
1/5/2011	3:18:24 PM	Helium MFC set to  0.000000
1/5/2011	3:18:24 PM	H2 MFC set to  0.000000
1/5/2011	3:18:24 PM	BCl3 MFC set to  0.000000
1/5/2011	3:18:24 PM	PHl3 MFC set to  0.000000
1/5/2011	3:18:24 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:18:24 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:18:24 PM	Tube furnace set to 0
1/5/2011	3:19:24 PM	H2 valve closed
1/5/2011	3:19:24 PM	BCl3 valve closed
1/5/2011	3:19:24 PM	PH3 valve closed
1/5/2011	3:19:24 PM	SiCl4 pre valve closed
1/5/2011	3:19:24 PM	SiCl4 post valve closed
1/5/2011	3:19:24 PM	Bubbler valve closed
1/5/2011	3:19:24 PM	Helium valve opened
1/5/2011	3:19:24 PM	Main Vac valve opened
1/5/2011	3:19:24 PM	Bypass valve opened
1/5/2011	3:19:24 PM	Helium MFC set to  100.000000
1/5/2011	3:19:24 PM	H2 MFC set to  0.000000
1/5/2011	3:19:24 PM	BCl3 MFC set to  0.000000
1/5/2011	3:19:24 PM	PHl3 MFC set to  0.000000
1/5/2011	3:19:24 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:19:24 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:19:24 PM	Tube furnace set to 0
1/5/2011	3:20:24 PM	Helium valve closed
1/5/2011	3:20:24 PM	H2 valve closed
1/5/2011	3:20:24 PM	BCl3 valve closed
1/5/2011	3:20:24 PM	PH3 valve closed
1/5/2011	3:20:24 PM	SiCl4 pre valve closed
1/5/2011	3:20:24 PM	SiCl4 post valve closed
1/5/2011	3:20:24 PM	Bubbler valve closed
1/5/2011	3:20:24 PM	Main Vac valve opened
1/5/2011	3:20:24 PM	Bypass valve opened
1/5/2011	3:20:24 PM	Helium MFC set to  0.000000
1/5/2011	3:20:24 PM	H2 MFC set to  0.000000
1/5/2011	3:20:24 PM	BCl3 MFC set to  0.000000
1/5/2011	3:20:24 PM	PHl3 MFC set to  0.000000
1/5/2011	3:20:24 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:20:24 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:20:25 PM	Tube furnace set to 0
1/5/2011	3:21:25 PM	H2 valve closed
1/5/2011	3:21:25 PM	BCl3 valve closed
1/5/2011	3:21:25 PM	PH3 valve closed
1/5/2011	3:21:25 PM	SiCl4 pre valve closed
1/5/2011	3:21:25 PM	SiCl4 post valve closed
1/5/2011	3:21:25 PM	Bubbler valve closed
1/5/2011	3:21:25 PM	Helium valve opened
1/5/2011	3:21:25 PM	Main Vac valve opened
1/5/2011	3:21:25 PM	Bypass valve opened
1/5/2011	3:21:25 PM	Helium MFC set to  100.000000
1/5/2011	3:21:25 PM	H2 MFC set to  0.000000
1/5/2011	3:21:25 PM	BCl3 MFC set to  0.000000
1/5/2011	3:21:25 PM	PHl3 MFC set to  0.000000
1/5/2011	3:21:25 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:21:25 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:21:25 PM	Tube furnace set to 0
1/5/2011	3:22:25 PM	Helium valve closed
1/5/2011	3:22:25 PM	H2 valve closed
1/5/2011	3:22:25 PM	BCl3 valve closed
1/5/2011	3:22:25 PM	PH3 valve closed
1/5/2011	3:22:25 PM	SiCl4 pre valve closed
1/5/2011	3:22:25 PM	SiCl4 post valve closed
1/5/2011	3:22:25 PM	Bubbler valve closed
1/5/2011	3:22:25 PM	Main Vac valve opened
1/5/2011	3:22:25 PM	Bypass valve opened
1/5/2011	3:22:25 PM	Helium MFC set to  0.000000
1/5/2011	3:22:25 PM	H2 MFC set to  0.000000
1/5/2011	3:22:25 PM	BCl3 MFC set to  0.000000
1/5/2011	3:22:25 PM	PHl3 MFC set to  0.000000
1/5/2011	3:22:25 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:22:25 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:22:25 PM	Tube furnace set to 0
1/5/2011	3:23:25 PM	H2 valve closed
1/5/2011	3:23:25 PM	BCl3 valve closed
1/5/2011	3:23:25 PM	PH3 valve closed
1/5/2011	3:23:25 PM	SiCl4 pre valve closed
1/5/2011	3:23:25 PM	SiCl4 post valve closed
1/5/2011	3:23:25 PM	Bubbler valve closed
1/5/2011	3:23:25 PM	Helium valve opened
1/5/2011	3:23:25 PM	Main Vac valve opened
1/5/2011	3:23:25 PM	Bypass valve opened
1/5/2011	3:23:25 PM	Helium MFC set to  100.000000
1/5/2011	3:23:25 PM	H2 MFC set to  0.000000
1/5/2011	3:23:25 PM	BCl3 MFC set to  0.000000
1/5/2011	3:23:25 PM	PHl3 MFC set to  0.000000
1/5/2011	3:23:25 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:23:25 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:23:25 PM	Tube furnace set to 0
1/5/2011	3:24:25 PM	Helium valve closed
1/5/2011	3:24:25 PM	H2 valve closed
1/5/2011	3:24:25 PM	BCl3 valve closed
1/5/2011	3:24:25 PM	PH3 valve closed
1/5/2011	3:24:25 PM	SiCl4 pre valve closed
1/5/2011	3:24:25 PM	SiCl4 post valve closed
1/5/2011	3:24:25 PM	Bubbler valve closed
1/5/2011	3:24:25 PM	Main Vac valve opened
1/5/2011	3:24:25 PM	Bypass valve opened
1/5/2011	3:24:25 PM	Helium MFC set to  0.000000
1/5/2011	3:24:25 PM	H2 MFC set to  0.000000
1/5/2011	3:24:25 PM	BCl3 MFC set to  0.000000
1/5/2011	3:24:25 PM	PHl3 MFC set to  0.000000
1/5/2011	3:24:25 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:24:25 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:24:25 PM	Tube furnace set to 0
1/5/2011	3:25:25 PM	H2 valve closed
1/5/2011	3:25:25 PM	BCl3 valve closed
1/5/2011	3:25:25 PM	PH3 valve closed
1/5/2011	3:25:25 PM	SiCl4 pre valve closed
1/5/2011	3:25:25 PM	SiCl4 post valve closed
1/5/2011	3:25:25 PM	Bubbler valve closed
1/5/2011	3:25:25 PM	Helium valve opened
1/5/2011	3:25:25 PM	Main Vac valve opened
1/5/2011	3:25:25 PM	Bypass valve opened
1/5/2011	3:25:25 PM	Helium MFC set to  100.000000
1/5/2011	3:25:25 PM	H2 MFC set to  0.000000
1/5/2011	3:25:25 PM	BCl3 MFC set to  0.000000
1/5/2011	3:25:25 PM	PHl3 MFC set to  0.000000
1/5/2011	3:25:25 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:25:25 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:25:26 PM	Tube furnace set to 0
1/5/2011	3:26:26 PM	Helium valve closed
1/5/2011	3:26:26 PM	H2 valve closed
1/5/2011	3:26:26 PM	BCl3 valve closed
1/5/2011	3:26:26 PM	PH3 valve closed
1/5/2011	3:26:26 PM	SiCl4 pre valve closed
1/5/2011	3:26:26 PM	SiCl4 post valve closed
1/5/2011	3:26:26 PM	Bubbler valve closed
1/5/2011	3:26:26 PM	Main Vac valve opened
1/5/2011	3:26:26 PM	Bypass valve opened
1/5/2011	3:26:26 PM	Helium MFC set to  0.000000
1/5/2011	3:26:26 PM	H2 MFC set to  0.000000
1/5/2011	3:26:26 PM	BCl3 MFC set to  0.000000
1/5/2011	3:26:26 PM	PHl3 MFC set to  0.000000
1/5/2011	3:26:26 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:26:26 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:26:26 PM	Tube furnace set to 0
1/5/2011	3:27:26 PM	H2 valve closed
1/5/2011	3:27:26 PM	BCl3 valve closed
1/5/2011	3:27:26 PM	PH3 valve closed
1/5/2011	3:27:26 PM	SiCl4 pre valve closed
1/5/2011	3:27:26 PM	SiCl4 post valve closed
1/5/2011	3:27:26 PM	Bubbler valve closed
1/5/2011	3:27:26 PM	Helium valve opened
1/5/2011	3:27:26 PM	Main Vac valve opened
1/5/2011	3:27:26 PM	Bypass valve opened
1/5/2011	3:27:26 PM	Helium MFC set to  100.000000
1/5/2011	3:27:26 PM	H2 MFC set to  0.000000
1/5/2011	3:27:26 PM	BCl3 MFC set to  0.000000
1/5/2011	3:27:26 PM	PHl3 MFC set to  0.000000
1/5/2011	3:27:26 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:27:26 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:27:26 PM	Tube furnace set to 0
1/5/2011	3:28:26 PM	Helium valve closed
1/5/2011	3:28:26 PM	H2 valve closed
1/5/2011	3:28:26 PM	BCl3 valve closed
1/5/2011	3:28:26 PM	PH3 valve closed
1/5/2011	3:28:26 PM	SiCl4 pre valve closed
1/5/2011	3:28:26 PM	SiCl4 post valve closed
1/5/2011	3:28:26 PM	Bubbler valve closed
1/5/2011	3:28:26 PM	Main Vac valve opened
1/5/2011	3:28:26 PM	Bypass valve opened
1/5/2011	3:28:26 PM	Helium MFC set to  0.000000
1/5/2011	3:28:26 PM	H2 MFC set to  0.000000
1/5/2011	3:28:26 PM	BCl3 MFC set to  0.000000
1/5/2011	3:28:26 PM	PHl3 MFC set to  0.000000
1/5/2011	3:28:26 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:28:26 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:28:26 PM	Tube furnace set to 0
1/5/2011	3:29:26 PM	H2 valve closed
1/5/2011	3:29:26 PM	BCl3 valve closed
1/5/2011	3:29:26 PM	PH3 valve closed
1/5/2011	3:29:26 PM	SiCl4 pre valve closed
1/5/2011	3:29:26 PM	SiCl4 post valve closed
1/5/2011	3:29:26 PM	Bubbler valve closed
1/5/2011	3:29:26 PM	Helium valve opened
1/5/2011	3:29:26 PM	Main Vac valve opened
1/5/2011	3:29:26 PM	Bypass valve opened
1/5/2011	3:29:26 PM	Helium MFC set to  100.000000
1/5/2011	3:29:26 PM	H2 MFC set to  0.000000
1/5/2011	3:29:26 PM	BCl3 MFC set to  0.000000
1/5/2011	3:29:26 PM	PHl3 MFC set to  0.000000
1/5/2011	3:29:26 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:29:26 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:29:26 PM	Tube furnace set to 0
1/5/2011	3:30:26 PM	Helium valve closed
1/5/2011	3:30:26 PM	H2 valve closed
1/5/2011	3:30:26 PM	BCl3 valve closed
1/5/2011	3:30:26 PM	PH3 valve closed
1/5/2011	3:30:26 PM	SiCl4 pre valve closed
1/5/2011	3:30:26 PM	SiCl4 post valve closed
1/5/2011	3:30:26 PM	Bubbler valve closed
1/5/2011	3:30:26 PM	Main Vac valve opened
1/5/2011	3:30:26 PM	Bypass valve opened
1/5/2011	3:30:26 PM	Helium MFC set to  0.000000
1/5/2011	3:30:26 PM	H2 MFC set to  0.000000
1/5/2011	3:30:26 PM	BCl3 MFC set to  0.000000
1/5/2011	3:30:26 PM	PHl3 MFC set to  0.000000
1/5/2011	3:30:26 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:30:26 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:30:27 PM	Tube furnace set to 0
1/5/2011	3:30:28 PM	Run finished at 3:30 PM
1/5/2011	3:30:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/5/2011	3:52:02 PM	Recipe started at 3:52 PM
1/5/2011	3:52:02 PM	Helium valve closed
1/5/2011	3:52:02 PM	BCl3 valve closed
1/5/2011	3:52:02 PM	PH3 valve closed
1/5/2011	3:52:02 PM	SiCl4 pre valve closed
1/5/2011	3:52:02 PM	SiCl4 post valve closed
1/5/2011	3:52:02 PM	Main Vac valve closed
1/5/2011	3:52:02 PM	Bypass valve closed
1/5/2011	3:52:02 PM	Bubbler valve closed
1/5/2011	3:52:02 PM	H2 valve opened
1/5/2011	3:52:02 PM	Helium MFC set to  0.000000
1/5/2011	3:52:03 PM	H2 MFC set to  500.000000
1/5/2011	3:52:03 PM	BCl3 MFC set to  0.000000
1/5/2011	3:52:03 PM	PHl3 MFC set to  0.000000
1/5/2011	3:52:03 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:52:03 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:52:03 PM	Tube furnace set to 0
1/5/2011	3:53:24 PM	Helium valve closed
1/5/2011	3:53:24 PM	BCl3 valve closed
1/5/2011	3:53:24 PM	PH3 valve closed
1/5/2011	3:53:24 PM	SiCl4 pre valve closed
1/5/2011	3:53:24 PM	SiCl4 post valve closed
1/5/2011	3:53:24 PM	Main Vac valve closed
1/5/2011	3:53:24 PM	Bypass valve closed
1/5/2011	3:53:24 PM	H2 valve opened
1/5/2011	3:53:24 PM	Bubbler valve opened
1/5/2011	3:53:24 PM	Helium MFC set to  0.000000
1/5/2011	3:53:24 PM	H2 MFC set to  500.000000
1/5/2011	3:53:24 PM	BCl3 MFC set to  0.000000
1/5/2011	3:53:24 PM	PHl3 MFC set to  0.000000
1/5/2011	3:53:24 PM	SiCl4 MFC set to  0.000000
1/5/2011	3:53:24 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	3:53:24 PM	Tube furnace set to 1000
1/5/2011	4:13:24 PM	Helium valve closed
1/5/2011	4:13:24 PM	PH3 valve closed
1/5/2011	4:13:24 PM	Main Vac valve closed
1/5/2011	4:13:24 PM	Bypass valve closed
1/5/2011	4:13:24 PM	H2 valve opened
1/5/2011	4:13:24 PM	BCl3 valve opened
1/5/2011	4:13:24 PM	SiCl4 pre valve opened
1/5/2011	4:13:24 PM	SiCl4 post valve opened
1/5/2011	4:13:24 PM	Bubbler valve opened
1/5/2011	4:13:24 PM	Helium MFC set to  0.000000
1/5/2011	4:13:24 PM	H2 MFC set to  500.000000
1/5/2011	4:13:24 PM	BCl3 MFC set to  2.000000
1/5/2011	4:13:24 PM	PHl3 MFC set to  0.000000
1/5/2011	4:13:24 PM	SiCl4 MFC set to  50.000000
1/5/2011	4:13:24 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	4:13:24 PM	Tube furnace set to 1000
1/5/2011	4:28:24 PM	H2 valve closed
1/5/2011	4:28:24 PM	BCl3 valve closed
1/5/2011	4:28:24 PM	PH3 valve closed
1/5/2011	4:28:24 PM	SiCl4 pre valve closed
1/5/2011	4:28:24 PM	SiCl4 post valve closed
1/5/2011	4:28:24 PM	Main Vac valve closed
1/5/2011	4:28:24 PM	Bypass valve closed
1/5/2011	4:28:24 PM	Helium valve opened
1/5/2011	4:28:24 PM	Bubbler valve opened
1/5/2011	4:28:24 PM	Helium MFC set to  500.000000
1/5/2011	4:28:24 PM	H2 MFC set to  0.000000
1/5/2011	4:28:24 PM	BCl3 MFC set to  0.000000
1/5/2011	4:28:24 PM	PHl3 MFC set to  0.000000
1/5/2011	4:28:24 PM	SiCl4 MFC set to  0.000000
1/5/2011	4:28:24 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	4:28:24 PM	Tube furnace set to 0
1/5/2011	4:48:24 PM	Helium valve closed
1/5/2011	4:48:24 PM	H2 valve closed
1/5/2011	4:48:24 PM	BCl3 valve closed
1/5/2011	4:48:24 PM	PH3 valve closed
1/5/2011	4:48:24 PM	SiCl4 pre valve closed
1/5/2011	4:48:24 PM	SiCl4 post valve closed
1/5/2011	4:48:24 PM	Main Vac valve closed
1/5/2011	4:48:24 PM	Bypass valve closed
1/5/2011	4:48:24 PM	Bubbler valve closed
1/5/2011	4:48:24 PM	Helium MFC set to  0.000000
1/5/2011	4:48:24 PM	H2 MFC set to  0.000000
1/5/2011	4:48:24 PM	BCl3 MFC set to  0.000000
1/5/2011	4:48:24 PM	PHl3 MFC set to  0.000000
1/5/2011	4:48:24 PM	SiCl4 MFC set to  0.000000
1/5/2011	4:48:24 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	4:48:24 PM	Tube furnace set to 0
1/5/2011	4:48:25 PM	Run finished at 4:48 PM
1/5/2011	4:57:44 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/5/2011	4:57:56 PM	Recipe started at 4:57 PM
1/5/2011	4:57:57 PM	Helium valve closed
1/5/2011	4:57:57 PM	H2 valve closed
1/5/2011	4:57:57 PM	BCl3 valve closed
1/5/2011	4:57:57 PM	PH3 valve closed
1/5/2011	4:57:57 PM	SiCl4 pre valve closed
1/5/2011	4:57:57 PM	SiCl4 post valve closed
1/5/2011	4:57:57 PM	Main Vac valve closed
1/5/2011	4:57:57 PM	Bubbler valve closed
1/5/2011	4:57:57 PM	Bypass valve opened
1/5/2011	4:57:57 PM	Helium MFC set to  0.000000
1/5/2011	4:57:57 PM	H2 MFC set to  0.000000
1/5/2011	4:57:57 PM	BCl3 MFC set to  0.000000
1/5/2011	4:57:57 PM	PHl3 MFC set to  0.000000
1/5/2011	4:57:57 PM	SiCl4 MFC set to  0.000000
1/5/2011	4:57:57 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	4:57:57 PM	Tube furnace set to 0
1/5/2011	4:58:56 PM	Helium valve closed
1/5/2011	4:58:56 PM	H2 valve closed
1/5/2011	4:58:56 PM	BCl3 valve closed
1/5/2011	4:58:56 PM	PH3 valve closed
1/5/2011	4:58:56 PM	SiCl4 pre valve closed
1/5/2011	4:58:56 PM	SiCl4 post valve closed
1/5/2011	4:58:56 PM	Bubbler valve closed
1/5/2011	4:58:56 PM	Main Vac valve opened
1/5/2011	4:58:56 PM	Bypass valve opened
1/5/2011	4:58:56 PM	Helium MFC set to  0.000000
1/5/2011	4:58:56 PM	H2 MFC set to  0.000000
1/5/2011	4:58:56 PM	BCl3 MFC set to  0.000000
1/5/2011	4:58:56 PM	PHl3 MFC set to  0.000000
1/5/2011	4:58:56 PM	SiCl4 MFC set to  0.000000
1/5/2011	4:58:56 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	4:58:56 PM	Tube furnace set to 0
1/5/2011	4:59:56 PM	H2 valve closed
1/5/2011	4:59:56 PM	BCl3 valve closed
1/5/2011	4:59:56 PM	PH3 valve closed
1/5/2011	4:59:56 PM	SiCl4 pre valve closed
1/5/2011	4:59:56 PM	SiCl4 post valve closed
1/5/2011	4:59:56 PM	Bubbler valve closed
1/5/2011	4:59:56 PM	Helium valve opened
1/5/2011	4:59:56 PM	Main Vac valve opened
1/5/2011	4:59:56 PM	Bypass valve opened
1/5/2011	4:59:56 PM	Helium MFC set to  100.000000
1/5/2011	4:59:56 PM	H2 MFC set to  0.000000
1/5/2011	4:59:56 PM	BCl3 MFC set to  0.000000
1/5/2011	4:59:56 PM	PHl3 MFC set to  0.000000
1/5/2011	4:59:56 PM	SiCl4 MFC set to  0.000000
1/5/2011	4:59:56 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	4:59:56 PM	Tube furnace set to 0
1/5/2011	5:00:56 PM	Helium valve closed
1/5/2011	5:00:56 PM	H2 valve closed
1/5/2011	5:00:56 PM	BCl3 valve closed
1/5/2011	5:00:56 PM	PH3 valve closed
1/5/2011	5:00:56 PM	SiCl4 pre valve closed
1/5/2011	5:00:56 PM	SiCl4 post valve closed
1/5/2011	5:00:56 PM	Bubbler valve closed
1/5/2011	5:00:56 PM	Main Vac valve opened
1/5/2011	5:00:56 PM	Bypass valve opened
1/5/2011	5:00:56 PM	Helium MFC set to  0.000000
1/5/2011	5:00:56 PM	H2 MFC set to  0.000000
1/5/2011	5:00:56 PM	BCl3 MFC set to  0.000000
1/5/2011	5:00:56 PM	PHl3 MFC set to  0.000000
1/5/2011	5:00:56 PM	SiCl4 MFC set to  0.000000
1/5/2011	5:00:56 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	5:00:57 PM	Tube furnace set to 0
1/5/2011	5:01:57 PM	H2 valve closed
1/5/2011	5:01:57 PM	BCl3 valve closed
1/5/2011	5:01:57 PM	PH3 valve closed
1/5/2011	5:01:57 PM	SiCl4 pre valve closed
1/5/2011	5:01:57 PM	SiCl4 post valve closed
1/5/2011	5:01:57 PM	Bubbler valve closed
1/5/2011	5:01:57 PM	Helium valve opened
1/5/2011	5:01:57 PM	Main Vac valve opened
1/5/2011	5:01:57 PM	Bypass valve opened
1/5/2011	5:01:57 PM	Helium MFC set to  100.000000
1/5/2011	5:01:57 PM	H2 MFC set to  0.000000
1/5/2011	5:01:57 PM	BCl3 MFC set to  0.000000
1/5/2011	5:01:57 PM	PHl3 MFC set to  0.000000
1/5/2011	5:01:57 PM	SiCl4 MFC set to  0.000000
1/5/2011	5:01:57 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	5:01:57 PM	Tube furnace set to 0
1/5/2011	5:02:57 PM	Helium valve closed
1/5/2011	5:02:57 PM	H2 valve closed
1/5/2011	5:02:57 PM	BCl3 valve closed
1/5/2011	5:02:57 PM	PH3 valve closed
1/5/2011	5:02:57 PM	SiCl4 pre valve closed
1/5/2011	5:02:57 PM	SiCl4 post valve closed
1/5/2011	5:02:57 PM	Bubbler valve closed
1/5/2011	5:02:57 PM	Main Vac valve opened
1/5/2011	5:02:57 PM	Bypass valve opened
1/5/2011	5:02:57 PM	Helium MFC set to  0.000000
1/5/2011	5:02:57 PM	H2 MFC set to  0.000000
1/5/2011	5:02:57 PM	BCl3 MFC set to  0.000000
1/5/2011	5:02:57 PM	PHl3 MFC set to  0.000000
1/5/2011	5:02:57 PM	SiCl4 MFC set to  0.000000
1/5/2011	5:02:57 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	5:02:57 PM	Tube furnace set to 0
1/5/2011	5:03:57 PM	H2 valve closed
1/5/2011	5:03:57 PM	BCl3 valve closed
1/5/2011	5:03:57 PM	PH3 valve closed
1/5/2011	5:03:57 PM	SiCl4 pre valve closed
1/5/2011	5:03:57 PM	SiCl4 post valve closed
1/5/2011	5:03:57 PM	Bubbler valve closed
1/5/2011	5:03:57 PM	Helium valve opened
1/5/2011	5:03:57 PM	Main Vac valve opened
1/5/2011	5:03:57 PM	Bypass valve opened
1/5/2011	5:03:57 PM	Helium MFC set to  100.000000
1/5/2011	5:03:57 PM	H2 MFC set to  0.000000
1/5/2011	5:03:57 PM	BCl3 MFC set to  0.000000
1/5/2011	5:03:57 PM	PHl3 MFC set to  0.000000
1/5/2011	5:03:57 PM	SiCl4 MFC set to  0.000000
1/5/2011	5:03:57 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	5:03:57 PM	Tube furnace set to 0
1/5/2011	5:04:57 PM	Helium valve closed
1/5/2011	5:04:57 PM	H2 valve closed
1/5/2011	5:04:57 PM	BCl3 valve closed
1/5/2011	5:04:57 PM	PH3 valve closed
1/5/2011	5:04:57 PM	SiCl4 pre valve closed
1/5/2011	5:04:57 PM	SiCl4 post valve closed
1/5/2011	5:04:57 PM	Bubbler valve closed
1/5/2011	5:04:57 PM	Main Vac valve opened
1/5/2011	5:04:57 PM	Bypass valve opened
1/5/2011	5:04:57 PM	Helium MFC set to  0.000000
1/5/2011	5:04:57 PM	H2 MFC set to  0.000000
1/5/2011	5:04:57 PM	BCl3 MFC set to  0.000000
1/5/2011	5:04:57 PM	PHl3 MFC set to  0.000000
1/5/2011	5:04:57 PM	SiCl4 MFC set to  0.000000
1/5/2011	5:04:57 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	5:04:57 PM	Tube furnace set to 0
1/5/2011	5:05:57 PM	H2 valve closed
1/5/2011	5:05:57 PM	BCl3 valve closed
1/5/2011	5:05:57 PM	PH3 valve closed
1/5/2011	5:05:57 PM	SiCl4 pre valve closed
1/5/2011	5:05:57 PM	SiCl4 post valve closed
1/5/2011	5:05:57 PM	Bubbler valve closed
1/5/2011	5:05:57 PM	Helium valve opened
1/5/2011	5:05:57 PM	Main Vac valve opened
1/5/2011	5:05:57 PM	Bypass valve opened
1/5/2011	5:05:57 PM	Helium MFC set to  100.000000
1/5/2011	5:05:57 PM	H2 MFC set to  0.000000
1/5/2011	5:05:57 PM	BCl3 MFC set to  0.000000
1/5/2011	5:05:57 PM	PHl3 MFC set to  0.000000
1/5/2011	5:05:57 PM	SiCl4 MFC set to  0.000000
1/5/2011	5:05:57 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	5:05:58 PM	Tube furnace set to 0
1/5/2011	5:06:58 PM	Helium valve closed
1/5/2011	5:06:58 PM	H2 valve closed
1/5/2011	5:06:58 PM	BCl3 valve closed
1/5/2011	5:06:58 PM	PH3 valve closed
1/5/2011	5:06:58 PM	SiCl4 pre valve closed
1/5/2011	5:06:58 PM	SiCl4 post valve closed
1/5/2011	5:06:58 PM	Bubbler valve closed
1/5/2011	5:06:58 PM	Main Vac valve opened
1/5/2011	5:06:58 PM	Bypass valve opened
1/5/2011	5:06:58 PM	Helium MFC set to  0.000000
1/5/2011	5:06:58 PM	H2 MFC set to  0.000000
1/5/2011	5:06:58 PM	BCl3 MFC set to  0.000000
1/5/2011	5:06:58 PM	PHl3 MFC set to  0.000000
1/5/2011	5:06:58 PM	SiCl4 MFC set to  0.000000
1/5/2011	5:06:58 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	5:06:58 PM	Tube furnace set to 0
1/5/2011	5:07:58 PM	H2 valve closed
1/5/2011	5:07:58 PM	BCl3 valve closed
1/5/2011	5:07:58 PM	PH3 valve closed
1/5/2011	5:07:58 PM	SiCl4 pre valve closed
1/5/2011	5:07:58 PM	SiCl4 post valve closed
1/5/2011	5:07:58 PM	Bubbler valve closed
1/5/2011	5:07:58 PM	Helium valve opened
1/5/2011	5:07:58 PM	Main Vac valve opened
1/5/2011	5:07:58 PM	Bypass valve opened
1/5/2011	5:07:58 PM	Helium MFC set to  100.000000
1/5/2011	5:07:58 PM	H2 MFC set to  0.000000
1/5/2011	5:07:58 PM	BCl3 MFC set to  0.000000
1/5/2011	5:07:58 PM	PHl3 MFC set to  0.000000
1/5/2011	5:07:58 PM	SiCl4 MFC set to  0.000000
1/5/2011	5:07:58 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	5:07:58 PM	Tube furnace set to 0
1/5/2011	5:08:58 PM	Helium valve closed
1/5/2011	5:08:58 PM	H2 valve closed
1/5/2011	5:08:58 PM	BCl3 valve closed
1/5/2011	5:08:58 PM	PH3 valve closed
1/5/2011	5:08:58 PM	SiCl4 pre valve closed
1/5/2011	5:08:58 PM	SiCl4 post valve closed
1/5/2011	5:08:58 PM	Bubbler valve closed
1/5/2011	5:08:58 PM	Main Vac valve opened
1/5/2011	5:08:58 PM	Bypass valve opened
1/5/2011	5:08:58 PM	Helium MFC set to  0.000000
1/5/2011	5:08:58 PM	H2 MFC set to  0.000000
1/5/2011	5:08:58 PM	BCl3 MFC set to  0.000000
1/5/2011	5:08:58 PM	PHl3 MFC set to  0.000000
1/5/2011	5:08:58 PM	SiCl4 MFC set to  0.000000
1/5/2011	5:08:58 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	5:08:58 PM	Tube furnace set to 0
1/5/2011	5:09:58 PM	H2 valve closed
1/5/2011	5:09:58 PM	BCl3 valve closed
1/5/2011	5:09:58 PM	PH3 valve closed
1/5/2011	5:09:58 PM	SiCl4 pre valve closed
1/5/2011	5:09:58 PM	SiCl4 post valve closed
1/5/2011	5:09:58 PM	Bubbler valve closed
1/5/2011	5:09:58 PM	Helium valve opened
1/5/2011	5:09:58 PM	Main Vac valve opened
1/5/2011	5:09:58 PM	Bypass valve opened
1/5/2011	5:09:58 PM	Helium MFC set to  100.000000
1/5/2011	5:09:58 PM	H2 MFC set to  0.000000
1/5/2011	5:09:58 PM	BCl3 MFC set to  0.000000
1/5/2011	5:09:58 PM	PHl3 MFC set to  0.000000
1/5/2011	5:09:58 PM	SiCl4 MFC set to  0.000000
1/5/2011	5:09:58 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	5:09:58 PM	Tube furnace set to 0
1/5/2011	5:10:58 PM	Helium valve closed
1/5/2011	5:10:58 PM	H2 valve closed
1/5/2011	5:10:58 PM	BCl3 valve closed
1/5/2011	5:10:58 PM	PH3 valve closed
1/5/2011	5:10:58 PM	SiCl4 pre valve closed
1/5/2011	5:10:58 PM	SiCl4 post valve closed
1/5/2011	5:10:58 PM	Bubbler valve closed
1/5/2011	5:10:58 PM	Main Vac valve opened
1/5/2011	5:10:58 PM	Bypass valve opened
1/5/2011	5:10:58 PM	Helium MFC set to  0.000000
1/5/2011	5:10:58 PM	H2 MFC set to  0.000000
1/5/2011	5:10:58 PM	BCl3 MFC set to  0.000000
1/5/2011	5:10:58 PM	PHl3 MFC set to  0.000000
1/5/2011	5:10:58 PM	SiCl4 MFC set to  0.000000
1/5/2011	5:10:58 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	5:10:59 PM	Tube furnace set to 0
1/5/2011	5:11:59 PM	H2 valve closed
1/5/2011	5:11:59 PM	BCl3 valve closed
1/5/2011	5:11:59 PM	PH3 valve closed
1/5/2011	5:11:59 PM	SiCl4 pre valve closed
1/5/2011	5:11:59 PM	SiCl4 post valve closed
1/5/2011	5:11:59 PM	Bubbler valve closed
1/5/2011	5:11:59 PM	Helium valve opened
1/5/2011	5:11:59 PM	Main Vac valve opened
1/5/2011	5:11:59 PM	Bypass valve opened
1/5/2011	5:11:59 PM	Helium MFC set to  100.000000
1/5/2011	5:11:59 PM	H2 MFC set to  0.000000
1/5/2011	5:11:59 PM	BCl3 MFC set to  0.000000
1/5/2011	5:11:59 PM	PHl3 MFC set to  0.000000
1/5/2011	5:11:59 PM	SiCl4 MFC set to  0.000000
1/5/2011	5:11:59 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	5:11:59 PM	Tube furnace set to 0
1/5/2011	5:12:59 PM	Helium valve closed
1/5/2011	5:12:59 PM	H2 valve closed
1/5/2011	5:12:59 PM	BCl3 valve closed
1/5/2011	5:12:59 PM	PH3 valve closed
1/5/2011	5:12:59 PM	SiCl4 pre valve closed
1/5/2011	5:12:59 PM	SiCl4 post valve closed
1/5/2011	5:12:59 PM	Bubbler valve closed
1/5/2011	5:12:59 PM	Main Vac valve opened
1/5/2011	5:12:59 PM	Bypass valve opened
1/5/2011	5:12:59 PM	Helium MFC set to  0.000000
1/5/2011	5:12:59 PM	H2 MFC set to  0.000000
1/5/2011	5:12:59 PM	BCl3 MFC set to  0.000000
1/5/2011	5:12:59 PM	PHl3 MFC set to  0.000000
1/5/2011	5:12:59 PM	SiCl4 MFC set to  0.000000
1/5/2011	5:12:59 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	5:12:59 PM	Tube furnace set to 0
1/5/2011	5:13:59 PM	H2 valve closed
1/5/2011	5:13:59 PM	BCl3 valve closed
1/5/2011	5:13:59 PM	PH3 valve closed
1/5/2011	5:13:59 PM	SiCl4 pre valve closed
1/5/2011	5:13:59 PM	SiCl4 post valve closed
1/5/2011	5:13:59 PM	Bubbler valve closed
1/5/2011	5:13:59 PM	Helium valve opened
1/5/2011	5:13:59 PM	Main Vac valve opened
1/5/2011	5:13:59 PM	Bypass valve opened
1/5/2011	5:13:59 PM	Helium MFC set to  100.000000
1/5/2011	5:13:59 PM	H2 MFC set to  0.000000
1/5/2011	5:13:59 PM	BCl3 MFC set to  0.000000
1/5/2011	5:13:59 PM	PHl3 MFC set to  0.000000
1/5/2011	5:13:59 PM	SiCl4 MFC set to  0.000000
1/5/2011	5:13:59 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	5:13:59 PM	Tube furnace set to 0
1/5/2011	5:14:59 PM	Helium valve closed
1/5/2011	5:14:59 PM	H2 valve closed
1/5/2011	5:14:59 PM	BCl3 valve closed
1/5/2011	5:14:59 PM	PH3 valve closed
1/5/2011	5:14:59 PM	SiCl4 pre valve closed
1/5/2011	5:14:59 PM	SiCl4 post valve closed
1/5/2011	5:14:59 PM	Bubbler valve closed
1/5/2011	5:14:59 PM	Main Vac valve opened
1/5/2011	5:14:59 PM	Bypass valve opened
1/5/2011	5:14:59 PM	Helium MFC set to  0.000000
1/5/2011	5:14:59 PM	H2 MFC set to  0.000000
1/5/2011	5:14:59 PM	BCl3 MFC set to  0.000000
1/5/2011	5:14:59 PM	PHl3 MFC set to  0.000000
1/5/2011	5:14:59 PM	SiCl4 MFC set to  0.000000
1/5/2011	5:14:59 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	5:14:59 PM	Tube furnace set to 0
1/5/2011	5:15:59 PM	H2 valve closed
1/5/2011	5:15:59 PM	BCl3 valve closed
1/5/2011	5:15:59 PM	PH3 valve closed
1/5/2011	5:15:59 PM	SiCl4 pre valve closed
1/5/2011	5:15:59 PM	SiCl4 post valve closed
1/5/2011	5:15:59 PM	Bubbler valve closed
1/5/2011	5:15:59 PM	Helium valve opened
1/5/2011	5:16:00 PM	Main Vac valve opened
1/5/2011	5:16:00 PM	Bypass valve opened
1/5/2011	5:16:00 PM	Helium MFC set to  100.000000
1/5/2011	5:16:00 PM	H2 MFC set to  0.000000
1/5/2011	5:16:00 PM	BCl3 MFC set to  0.000000
1/5/2011	5:16:00 PM	PHl3 MFC set to  0.000000
1/5/2011	5:16:00 PM	SiCl4 MFC set to  0.000000
1/5/2011	5:16:00 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	5:16:00 PM	Tube furnace set to 0
1/5/2011	5:17:00 PM	Helium valve closed
1/5/2011	5:17:00 PM	H2 valve closed
1/5/2011	5:17:00 PM	BCl3 valve closed
1/5/2011	5:17:00 PM	PH3 valve closed
1/5/2011	5:17:00 PM	SiCl4 pre valve closed
1/5/2011	5:17:00 PM	SiCl4 post valve closed
1/5/2011	5:17:00 PM	Bubbler valve closed
1/5/2011	5:17:00 PM	Main Vac valve opened
1/5/2011	5:17:00 PM	Bypass valve opened
1/5/2011	5:17:00 PM	Helium MFC set to  0.000000
1/5/2011	5:17:00 PM	H2 MFC set to  0.000000
1/5/2011	5:17:00 PM	BCl3 MFC set to  0.000000
1/5/2011	5:17:00 PM	PHl3 MFC set to  0.000000
1/5/2011	5:17:00 PM	SiCl4 MFC set to  0.000000
1/5/2011	5:17:00 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	5:17:00 PM	Tube furnace set to 0
1/5/2011	5:18:00 PM	H2 valve closed
1/5/2011	5:18:00 PM	BCl3 valve closed
1/5/2011	5:18:00 PM	PH3 valve closed
1/5/2011	5:18:00 PM	SiCl4 pre valve closed
1/5/2011	5:18:00 PM	SiCl4 post valve closed
1/5/2011	5:18:00 PM	Bubbler valve closed
1/5/2011	5:18:00 PM	Helium valve opened
1/5/2011	5:18:00 PM	Main Vac valve opened
1/5/2011	5:18:00 PM	Bypass valve opened
1/5/2011	5:18:00 PM	Helium MFC set to  100.000000
1/5/2011	5:18:00 PM	H2 MFC set to  0.000000
1/5/2011	5:18:00 PM	BCl3 MFC set to  0.000000
1/5/2011	5:18:00 PM	PHl3 MFC set to  0.000000
1/5/2011	5:18:00 PM	SiCl4 MFC set to  0.000000
1/5/2011	5:18:00 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	5:18:00 PM	Tube furnace set to 0
1/5/2011	5:19:00 PM	Helium valve closed
1/5/2011	5:19:00 PM	H2 valve closed
1/5/2011	5:19:00 PM	BCl3 valve closed
1/5/2011	5:19:00 PM	PH3 valve closed
1/5/2011	5:19:00 PM	SiCl4 pre valve closed
1/5/2011	5:19:00 PM	SiCl4 post valve closed
1/5/2011	5:19:00 PM	Bubbler valve closed
1/5/2011	5:19:00 PM	Main Vac valve opened
1/5/2011	5:19:00 PM	Bypass valve opened
1/5/2011	5:19:00 PM	Helium MFC set to  0.000000
1/5/2011	5:19:00 PM	H2 MFC set to  0.000000
1/5/2011	5:19:00 PM	BCl3 MFC set to  0.000000
1/5/2011	5:19:00 PM	PHl3 MFC set to  0.000000
1/5/2011	5:19:00 PM	SiCl4 MFC set to  0.000000
1/5/2011	5:19:00 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	5:19:00 PM	Tube furnace set to 0
1/5/2011	5:19:01 PM	Run finished at 5:19 PM
1/5/2011	5:19:01 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\10x_he_purgepump.xml
1/5/2011	10:06:49 PM	Recipe started at 10:06 PM
1/5/2011	10:06:49 PM	Helium valve closed
1/5/2011	10:06:49 PM	BCl3 valve closed
1/5/2011	10:06:49 PM	PH3 valve closed
1/5/2011	10:06:49 PM	SiCl4 pre valve closed
1/5/2011	10:06:49 PM	SiCl4 post valve closed
1/5/2011	10:06:49 PM	Main Vac valve closed
1/5/2011	10:06:49 PM	Bypass valve closed
1/5/2011	10:06:49 PM	Bubbler valve closed
1/5/2011	10:06:49 PM	H2 valve opened
1/5/2011	10:06:49 PM	Helium MFC set to  0.000000
1/5/2011	10:06:49 PM	H2 MFC set to  500.000000
1/5/2011	10:06:49 PM	BCl3 MFC set to  0.000000
1/5/2011	10:06:49 PM	PHl3 MFC set to  0.000000
1/5/2011	10:06:49 PM	SiCl4 MFC set to  0.000000
1/5/2011	10:06:49 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	10:06:49 PM	Tube furnace set to 0
1/5/2011	10:08:12 PM	Helium valve closed
1/5/2011	10:08:12 PM	BCl3 valve closed
1/5/2011	10:08:12 PM	PH3 valve closed
1/5/2011	10:08:12 PM	SiCl4 pre valve closed
1/5/2011	10:08:12 PM	SiCl4 post valve closed
1/5/2011	10:08:12 PM	Main Vac valve closed
1/5/2011	10:08:12 PM	Bypass valve closed
1/5/2011	10:08:12 PM	H2 valve opened
1/5/2011	10:08:12 PM	Bubbler valve opened
1/5/2011	10:08:12 PM	Helium MFC set to  0.000000
1/5/2011	10:08:12 PM	H2 MFC set to  500.000000
1/5/2011	10:08:12 PM	BCl3 MFC set to  0.000000
1/5/2011	10:08:12 PM	PHl3 MFC set to  0.000000
1/5/2011	10:08:12 PM	SiCl4 MFC set to  0.000000
1/5/2011	10:08:12 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	10:08:12 PM	Tube furnace set to 1000
1/5/2011	10:28:12 PM	Helium valve closed
1/5/2011	10:28:12 PM	PH3 valve closed
1/5/2011	10:28:12 PM	Main Vac valve closed
1/5/2011	10:28:12 PM	Bypass valve closed
1/5/2011	10:28:12 PM	H2 valve opened
1/5/2011	10:28:12 PM	BCl3 valve opened
1/5/2011	10:28:12 PM	SiCl4 pre valve opened
1/5/2011	10:28:12 PM	SiCl4 post valve opened
1/5/2011	10:28:12 PM	Bubbler valve opened
1/5/2011	10:28:12 PM	Helium MFC set to  0.000000
1/5/2011	10:28:12 PM	H2 MFC set to  500.000000
1/5/2011	10:28:12 PM	BCl3 MFC set to  1.000000
1/5/2011	10:28:12 PM	PHl3 MFC set to  0.000000
1/5/2011	10:28:12 PM	SiCl4 MFC set to  50.000000
1/5/2011	10:28:12 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	10:28:12 PM	Tube furnace set to 1000
1/5/2011	10:43:12 PM	H2 valve closed
1/5/2011	10:43:12 PM	BCl3 valve closed
1/5/2011	10:43:12 PM	PH3 valve closed
1/5/2011	10:43:12 PM	SiCl4 pre valve closed
1/5/2011	10:43:12 PM	SiCl4 post valve closed
1/5/2011	10:43:12 PM	Main Vac valve closed
1/5/2011	10:43:12 PM	Bypass valve closed
1/5/2011	10:43:12 PM	Helium valve opened
1/5/2011	10:43:12 PM	Bubbler valve opened
1/5/2011	10:43:12 PM	Helium MFC set to  500.000000
1/5/2011	10:43:12 PM	H2 MFC set to  0.000000
1/5/2011	10:43:12 PM	BCl3 MFC set to  0.000000
1/5/2011	10:43:12 PM	PHl3 MFC set to  0.000000
1/5/2011	10:43:12 PM	SiCl4 MFC set to  0.000000
1/5/2011	10:43:12 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	10:43:12 PM	Tube furnace set to 0
1/5/2011	11:03:12 PM	Helium valve closed
1/5/2011	11:03:12 PM	H2 valve closed
1/5/2011	11:03:12 PM	BCl3 valve closed
1/5/2011	11:03:12 PM	PH3 valve closed
1/5/2011	11:03:12 PM	SiCl4 pre valve closed
1/5/2011	11:03:12 PM	SiCl4 post valve closed
1/5/2011	11:03:12 PM	Main Vac valve closed
1/5/2011	11:03:12 PM	Bypass valve closed
1/5/2011	11:03:12 PM	Bubbler valve closed
1/5/2011	11:03:12 PM	Helium MFC set to  0.000000
1/5/2011	11:03:12 PM	H2 MFC set to  0.000000
1/5/2011	11:03:12 PM	BCl3 MFC set to  0.000000
1/5/2011	11:03:12 PM	PHl3 MFC set to  0.000000
1/5/2011	11:03:12 PM	SiCl4 MFC set to  0.000000
1/5/2011	11:03:12 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:03:12 PM	Tube furnace set to 0
1/5/2011	11:03:12 PM	Run finished at 11:03 PM
1/5/2011	11:58:19 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
1/5/2011	11:58:19 PM	Recipe started at 11:58 PM
1/5/2011	11:58:19 PM	Helium valve closed
1/5/2011	11:58:19 PM	H2 valve closed
1/5/2011	11:58:19 PM	BCl3 valve closed
1/5/2011	11:58:19 PM	PH3 valve closed
1/5/2011	11:58:19 PM	SiCl4 pre valve closed
1/5/2011	11:58:19 PM	SiCl4 post valve closed
1/5/2011	11:58:19 PM	Main Vac valve closed
1/5/2011	11:58:19 PM	Bubbler valve closed
1/5/2011	11:58:19 PM	Bypass valve opened
1/5/2011	11:58:19 PM	Helium MFC set to  0.000000
1/5/2011	11:58:19 PM	H2 MFC set to  0.000000
1/5/2011	11:58:19 PM	BCl3 MFC set to  0.000000
1/5/2011	11:58:19 PM	PHl3 MFC set to  0.000000
1/5/2011	11:58:19 PM	SiCl4 MFC set to  0.000000
1/5/2011	11:58:19 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:58:19 PM	Tube furnace set to 0
1/5/2011	11:59:24 PM	Helium valve closed
1/5/2011	11:59:24 PM	H2 valve closed
1/5/2011	11:59:24 PM	BCl3 valve closed
1/5/2011	11:59:24 PM	PH3 valve closed
1/5/2011	11:59:24 PM	SiCl4 pre valve closed
1/5/2011	11:59:24 PM	SiCl4 post valve closed
1/5/2011	11:59:24 PM	Bubbler valve closed
1/5/2011	11:59:24 PM	Main Vac valve opened
1/5/2011	11:59:24 PM	Bypass valve opened
1/5/2011	11:59:24 PM	Helium MFC set to  0.000000
1/5/2011	11:59:24 PM	H2 MFC set to  0.000000
1/5/2011	11:59:24 PM	BCl3 MFC set to  0.000000
1/5/2011	11:59:24 PM	PHl3 MFC set to  0.000000
1/5/2011	11:59:24 PM	SiCl4 MFC set to  0.000000
1/5/2011	11:59:24 PM	Bypass solenoid MFC set to  0.000000
1/5/2011	11:59:24 PM	Tube furnace set to 0
1/5/2011	11:59:24 PM	Run finished at 11:59 PM
1/5/2011	11:59:24 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
